Optical emission patterns and microwave field distributions in a cylindrical microwave plasma source

Thin Solid Films

Volumn 390, Issue 1-2, 2001, Pages 197-201

  Fang, Fang ^a   Liang, Rongqing ^a   Ou, Qiongrong ^a   Sui, Yifeng ^a  

^a INSTITUTE OF PLASMA PHYSICS   (China)

Author keywords

Electron field distribution; Microwave; Mode transition; Optical emission pattern; Slots

Indexed keywords

ELECTRONS; EMISSION SPECTROSCOPY; MICROWAVES; PLASMA DENSITY; RECTANGULAR WAVEGUIDES;

ELECTRON FIELD DISTRIBUTION;

PLASMA SOURCES;

EID: 0035973392     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)00919-1     Document Type: Article

References (16)

1. A versatile microwave plasma applicator
2. Excimer laser