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W. H. Teh, U. Durig, G. Salis, R. Harbers, U. Drechsler, R. F. Mahrt, C. G. Smith, and H. J. Guntherodt, "SU-8 for real three-dimensional subdiffraction-limit two-photon microfabrication," Appl. Phys. Lett. 84(20), 4095-4097 (2004).
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(2004)
Appl. Phys. Lett.
, vol.84
, Issue.20
, pp. 4095-4097
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Teh, W.H.1
Durig, U.2
Salis, G.3
Harbers, R.4
Drechsler, U.5
Mahrt, R.F.6
Smith, C.G.7
Guntherodt, H.J.8
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