Influence of deposition angle on the properties of ZrO2 thin films fabricated by using oblique angle deposition

Journal of the Korean Physical Society

Volumn 56, Issue 41, 2010, Pages 1282-1286

  Sobahan, K M A ^a   Park, Yong Jun ^a   Hwangbo, Chang Kwon ^a  

^a Inha University   (South Korea)

Author keywords

Birefringence; Oblique angle deposition; ZrO2 films

Indexed keywords

EID: 77956356292     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.56.1282     Document Type: Article

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