Simplified and direct microchannels fabrication at wafer scale with negative and positive photopolymerizable polydimethylsiloxanes

Microfluidics and Nanofluidics

Volumn 9, Issue 2-3, 2010, Pages 439-446

  Rivas, Adrián Martínez ^a   Suhard, Samuel ^a,b   Mauzac, Monique ^a   Mingotaud, Anne Françoise ^a   Séverac, Childérick ^a   Collin, Dominique ^c   Martinoty, Philippe ^c   Vieu, Christophe ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

^b CNRS   (France)

^c INSTITUT CHARLES SADRON   (France)

Author keywords

Lab on chips; MEMS; Microfluidic channels; N PhotoPDMS; Nanoelectrodes; P photoPDMS; Photodefinable PDMS

Indexed keywords

MICROFLUIDIC CHANNELS; NANO-ELECTRODES; ON CHIPS; PHOTO-DEFINABLE; PHOTOPDMS;

CONCURRENT ENGINEERING; FLUIDIC DEVICES; JOB ANALYSIS; MECHANICAL PROPERTIES; MICROCHANNELS; MICROFLUIDICS; POLYDIMETHYLSILOXANE; RAPID PROTOTYPING; SILICA; SILICON WAFERS; WAFER BONDING;

SILICONES;

EID: 77956263699     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-009-0560-0     Document Type: Article

References (27)

1. Bhagat AAS, Jothimuthu P, Papautsky I (2007) Photodefinable polydimethylsiloxane (PDMS) for rapid lab-on-a-chip prototyping. Lab Chip 7:1192-1197
2. Brunner C, Ernst KH, Hess H, Vogel V (2004) Lifetime of biomolecules in polymer-based hybrid nanodevices. Nanotechnology 15:S5406-S5548
3. Chen J, Vaino AR, Smith RL, Collins SC (2008) Photomediated crosslinking of cinnamated PDMS for in situ direct photopatterning. J Polym Sci A 46:3482-3487
4. Choi KM, Rogers JA (2003) A photocurable poly(dimethylsiloxane) chemistry designed for soft lithographic molding and printing in the nanometer regime. J Am Chem Soc 125:4060-4061
5. Collin D, Martinoty P (2003) Dynamic macroscopic heterogeneities in a flexible linear polymer melt. Physica A 320:235-248
6. Collin D, Auernhammer G, Gavat O, Martinoty P, Brand H (2003) Frozen-in magnetic order in uniaxial magnetic gels: preparation and physical properties. Macromol Rapid Commun 24:737-741
7. Cong H, Pan T (2008) Photopatternable conductive PDMS materials microfabrication. Adv Funct Mater 18:1912-1921
8. Dittrich PS, Manz A (2006) Lab-on-a-chip: microfluidics in drug discovery. Nat Rev Drug Discov 5:210-218
9. Dou YH, Bao N, Xu JJ, Meng F, Chen HY (2004) Separation of proteins on surface-modified poly(dimethylsiloxane) microfluidic devices. Electrophoresis 25(17):3024-3031
10. Dow C (2005) Patternable silicones for electronics. Product Data Sheet, Information Product for WL-5351 and WL-5150. http://www.dowcorning.com/ applications/search
11. Duffy DC, Schueller OJA, Brittain ST, Whitesides GM (1999) Rapid prototyping of microfluidic switches in poly(dimethylsiloxane) and their actuation by electro-osmotic flow. J Micromech Microeng 9:211-217
12. Jothimuthu P, Carroll A, Bhagat AAS, Lin G, James ME, Papautsky I (2009) Photodefinable PDMS thin films for microfabrication applications. J Micromech Microeng 19:045024
13. Lötters JC, Olthuis W, Veltink PH, Bergveld P (1997) The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications. J Micromech Microeng 7:145-147
14. Martínez Rivas A, Séverac C, Carcenac F, Saya D, Nicu L, Vieu C (2008) Abstract MNE conference
15. McDonald JC, Whitesides GM (2002) Poly(dimethylsiloxane) as a material for fabricating microfluidic devices. Acc Chem Res 35(7):491-499
16. Mitchell P (2001) Microfluidics-downsizing large-scale biology. Nat Biotechnol 19:717-721
17. Pouliquen L, Coqueret X (1996) Polysiloxanes with benzophenone side groups: factors affecting their efficiency as free radical polymerization photoinitiators. Macromol Chem Phys 197:4045-4060
18. Rogez D, Francius G, Finkelmann H, Martinoty P (2006) Shear mechanical anisotropy of side chain liquid-crystal elastomers: influence of sample preparation. Eur Phys J E 20:369-378
19. Shaikh KA, Ryu KS, Goluch ED et al (2005) A modular microfluidic architecture for integrated biochemical analysis. PNAS 102(28): 9745-9750
20. Sia SK, Whitesides GM (2003) Microfluidic devices fabricated in poly(dimethylsiloxane) for biological studies. Electrophoresis 24:3563-3576
21. Suhard S, Fau P, Chaudret B, Sabo-Etienne S et al (2009) When energetic materials, PDMS-based elastomers, and microelectronic processes work together: fabrication of a disposable microactuator. Chem Mat 21:1069-1076
22. Sun F, Jiang SL (2007) Synthesis and characterization of photosensitive polysiloxane. Nucl Instrum Methods Phys Res B 254:125-130
23. Torbiéro B, Pourciel-Gouzy M, Humenyuk I, Doucet JB, Martinez A, Temple-Boyer P (2006) Mass patterning of polysiloxane layers using spin coating and photolithography techniquesm. Microelectron J 37(2):133-136
24. Tsougeni K, Tserepi A, Gogolides E (2007) Photosensitive poly(dimethylsiloxane) materials for microfluidic applications. Microelectron Eng 84:1104-1108
25. Tuomikoski S, Franssila S (2005) Free-standing SU-8 microfluidic chips by adhesive bonding and release etching. Sens Actuators A 120:408-415
26. Wang PI, Nalamasu O, Ghoshal R, Ghoshal R, Schaper CD, Li A, Lu TM (2008) Novel photocurable epoxy siloxane polymers for photolithography and imprint lithograpy applications. J Vac Sci Technol B 26(1):244-248
27. Wheeler AR, Throndset WR, Whelan RJ et al (2003) Microfluidic device for single-cell analysis. Anal Chem 75(14):3581-3586