When energetic materials, PDMS-Based elastomers, and microelectronic processes work together: Fabrication of a disposable microactuator

Chemistry of Materials

Volumn 21, Issue 6, 2009, Pages 1069-1076

  Suhard, Samuel ^a,b   Fau, Pierre ^a   Chaudret, Bruno ^a   Sabo Etienne, Sylviane ^a   Mauzac, Monique ^b   Mingotaud, Anne Françoise ^b   Ardila Rodriguez, Gustavo ^b   Rossi, Carole ^b   Guimon, Marie Frangoise ^c  

^a UNIVERSITÉ PAUL SABATIER   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

^c UMR 5254   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGETIC MATERIALS; HETEROMETALLIC; MECHANICAL STRESS; MICRO-METER SCALE; MICROELECTRONIC PROCESS; PHOTOCURABLE; POLYSILOXANE; POLYSILOXANES; PYROTECHNIC ACTUATORS; SMART MATERIALS; THIN ELASTIC MEMBRANES; WERNER COMPLEXES; XPS;

COBALT COMPOUNDS; GRAFTING (CHEMICAL); MANGANESE; MANGANESE COMPOUNDS; MICROACTUATORS; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SILANES; SILICON WAFERS; SILICONES; STRESSES; THICKNESS MEASUREMENT;

BIOLOGICAL MATERIALS;

EID: 65249171358     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm803146y     Document Type: Article

References (32)

1. Buguin. A.; Li, M. H.; Sillberzan, P.; Ladoux. B.; Keller. P. J. Am. Chem. Soc. 2006, 125. 1088-1089.
2. Marsella, M. J.; Reid, R. J.; Estassi, S.; Wang, L. S. J. Am. Chem. Soc. 2002, 124, 12507-12510.
3. Nisar, A.; Afzulpurkar, Mahaisvariya, N. B.; Tuantranont, A. Sens. Actuators, B 2008, 130. 917-942.
4. Rossi, C.; Esteve, D. Sens. Actuators, B 2005, 120, 297-310.
5. Hong, C. C.; Murugesan. S.; Kim, S.; Beaucage, G.; Choi, J. W.; Ahn. C. H. Lap Chip 2003, 3. 281-286.
6. Choi, Y. H.; Son, S. U.; Lee, S. S. Sens. Actuators, A 2004, 111, 8-13.
7. Xia, Y.; Whitesides, G. M. Angew. Chem., Int. Ed. 1998, 37, 550-575.
8. Fu, A. Y.; Chou, H. P.; Spence, C.; Arnold, F. H.; Quake, S. R. Anal. Chem. 2002, 74, 2451-2457.
9. Unger, M. A.; Chou, H. P.; Thorsen, T.; Scherer. A.; Quake. S. R. Science 2000, 288, 113-116.
10. Ardila-Rodriguez, G. A.; Suhard, S.; Rossi, C.; Estève, D.; Fau, P.; Sabo-Etienne. S.; Mingotaud, A. F.; Mauzac. M.; Chaudret. B. J. Micromech. Microeng. 2008, 19, 015006.
11. Pradere, C.; Suhard, S.; Vendier, L.; Jacob, G.; Chaudret, B.; Sabo-Etienne, S. Dalton Trans. 2008, 20. 2725-2731.
12. Rossi, C.; Bover, P. T.; Estève, D. sens. Actuators, A 1998, 64, 241-245.
13. Ardila Rodríguez, G. A. PhD Thesis, Université Paul Sabatier, Toulouse, France, 2008.
14. Lötters, J. C.; Olthuis, W.; Veltink, P. H.; Bergveld, P. J. Micromech, Mcroeng. 1997, 7, 145-147.
15. Lötters, J. C.; Olthuis, W.; Veltink, P. H.; Bergveld, P. Microsystem Technol. 1997, 64-67.
16. Choi, K. M.; Rogers, J. A. J. Am. Chem. Soc. 2003, 125. 4060-4061.
17. Bhagat, A. A. S.; Jothimuthu, P.; Papautskv, I. Lab Chip 2007, 9, 1192-1197.
18. http://www.dowcoming.com/content/etronics/etronicspattern/ etronicspattern-photoov.asp.
19. Arkles, B. Sitane Coupling Agents: Connecting Across Boundaries; Gelest: Morrisville, PA, 2006; catalog and references therein.
20. Thibault, C.; Severac. C.; Mingotaud, A. F.; Vieu, C.; Mauzac, M. Langmuir 2007, 23, 10706-10714.
21. Wong, A. K. Y.; Krull, U. J. Anal. Bioanal. Chan. 2005, 383, 187-200.
22. Liu, L.; Engelhard, M. H.; Yan, M. J. Am. Chem. Soc. 2006, 128, 14067-14072.
23. Barrio, R.; Mafflotte. C.; Gandia, J. J.; Carabe, J. J. Non-Cryst, Solids 2006, 352, 945-949.
24. O'Brien. A. K.; Bowman, C. N. Macromolecules 2006, 39. 2501-2506.
25. Crowe, J. A.; Efimenko, K.; Genzer, J. Science and Technology of Silicones and Silicone-Modified Materials; ACS Symposium Series; American Chemical Society: Washington, D.C., 2007; Vol. 964, pp 222-255.
26. Wu, D.; Qin, J.; Lin, B. Lab Chip 2007, 7, 1490-1496.
27. Patrito, N.; McCague, C.; Norton, P. R.; Petersen, N. O. Langmuir 2007, 23, 715-719.
28. Eddings, M. A.; Johnson, M. A.; Gale. B. K. J. Micromech. Microeng. 2008, 18, 067001.
29. Bodas, D. S.; Kan-Malek, C. Sens. Actuators, B 2007, 120, 719-723.
30. Wu, Y.; Huang, Y.; Ma, H. J. Am. Chem. Soc. 2007, 129, 7226-7227.
31. Abgrall, P.; Lattes, C.; Conédéra, V.; Dollat, X.; Colin, S.; Gué, A. M. J. Micromech. Microeng. 2006, 16, 113-121.
32. Pauly, S. In Polymer Handbook 3rd ed.; Brandrup, J., Immergut, E. H., Eds.; Wiley Interscience: New York, 1989; p VI/435.