Photodefinable PDMS thin films for microfabrication applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Jothimuthu, Preetha ^a   Carroll, Andrew ^a   Bhagat, Ali Asgar S ^a   Lin, Gui ^b   Mark, James E ^b   Papautsky, Ian ^a  

^a University of Cincinnati   (United States)

^b UNIVERSITY OF CINCINNATI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT LIGHT; CURED FILMS; DIRECT-PATTERNING; EASY FABRICATION; LOW COSTS; MICROFLUIDIC CHIP; MULTI-LEVEL; MULTILAYER STRUCTURES; NON-PLANAR SURFACES; PHOTO PATTERNING; PHOTO-DEFINABLE; PHOTO-INITIATOR; PHOTOCROSS-LINKING; PHOTOPDMS; POLYDIMETHYLSILOXANE PDMS; REACTION CHEMISTRY; SHADOW MASK; TEMPLATE FABRICATION;

FABRICATION; INFRARED SPECTROSCOPY; MICROCHANNELS; PLASTIC FILMS; SPECTROSCOPIC ANALYSIS; SUBSTRATES; THIN FILMS;

SILICONES;

EID: 67849094323     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045024     Document Type: Article

References (30)

1. Sia S K and Whitesides G M 2003 Microfluidic devices fabricated in poly(dimethylsiloxane) for biological studies Electrophoresis 243 563-76
2. Duffy D C, McDonald J C, Schueller O J A and Whitesides G M 1998 Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) Anal. Chem. 70 4974-84
3. Piruska A, Nikcevic I, Lee S H, Ahn C, Heineman W R, Limbach P A and Seliskar C J 2005 The autofluorescence of plastic materials and chips measured under laser irradiation Lab Chip 5 1348-54
4. McDonald J C and Whitesides G M 2002 Poly(dimethylsiloxane) for fabricating microfluidic devices Acc. Chem. Res. 35 491-9
5. Lötters J C, Olthuis W, Veltink P H and Bergveld P 1997 The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications J. Micromech. Microeng. 7 145-7
6. Almasri M, Zhang W, Kine A, Chan Y, LaRue J C and Nelson R 2005 Tunable infrared filter based on elastic polymer springs Proc. SPIE 5770 190-8
7. Dow Corning WL-5000 series Datasheet, Dow Corning, available at www.dowcorning.com
8. Harkness B R et al 2004 Photopatternable silicone compositions for electronic packaging applications Proc. SPIE 5376 517-24
9. Desai P S, Taff M B and Voldman J 2008 A photopatternable silicone for biological applications Langmuir 24 575-81
10. Tsougeni K, Tserepi A and Gogolides E 2007 Photosensitive poly(dimethylsiloxane) materials for microfluidic applications Microelectron. Eng. 84 1104-8
11. Huck W T S, Bowden N, Onck P, Pardoen T, Hutchinson J W and Whitesides G M 2000 Ordering of spontaneously formed buckles on planar surfaces Langmuir 16 3497-501
12. Wang Y, Lai H H, Bachman M, Sims C E, Li G P and Allbritton N L 2005 Covalent micropatterning of poly(dimethylsiloxane) by photografting through a mask Anal. Chem. 77 7539-46
13. Bhagat A A S, Jothimuthu P and Papautsky I 2007 Photodefinable polydimethylsiloxane (PDMS) for rapid lab-on-a-chip prototyping Lab Chip 7 1-7
14. Muller U, Tempet H J and Neuegufeld N 1991 Photocrosslinking of silicones-5. Photo-induced polymerization of silicone with pendant acrylate groups in the presence of oxygen Eur. Polym. J. 27 621-5
15. Muller U, Jockusch S and Timpe H J 1992 Photocrosslinking of silicones: VI. Photocrosslinking kinetics of silicone acrylates and methacrylates J. Polym. Sci. A 30 2755-64
16. https://www.sigmaaldrich.com/catalog/search/ProductDetail/SIAL/239852
17. Lee J N, Park C and Whitesides G M 2003 Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices Anal. Chem. 75 6544-54
18. Kumar G, Wang Y C, Co C and Ho C 2003 Spatially controlled cell engineering on biomaterials using polyelectrolytes Langmuir 19 10550-6
19. Ciapetti G, Granchi D, Verri E, Savarino L, Cavedagna D and Pizzoferrata A 1996 Application of a combination of neutral red and amido black staining for rapid, reliable cytotoxicity testing of biomaterials Biomaterials 17 1259-64
20. Hsu C P 1997 Infrared spectroscopy Handbook of Instrumental Techniques for Analytical Chemistry (Englewood Cliffs, NJ: Prentice-Hall)
21. Iojoiu C, Ropot M, Abadie M J M, Harabagiu V, Pinteala M and Simionescu B C 2000 Synthesis and photocrosslinking of benzyl acrylate substituted polydimethylsiloxanes Eur. Polym. J. 36 2115-23
22. Campbell D J, Beckman K J, Calderon C E, Doolan P W, Moore R H, Ellis A B and Lisensky G C 1999 Replication and compression of bulk and surface structures with polydimethylsiloxane elastomer J. Chem. Educ. 75 537-41
23. http://www.gelest.com/Library/
24. http://www.dowcorning.com
25. Weizmann C, Bergmann E and Hirshberg Y 1938 Photochemical interaction between ketones and alcohols J. Am. Chem. Soc. 60 1530-3
26. Hammond G S, Baker W P and Moore W M 1961 Mechanisms of photoreactions in solution: I. Reduction of benzophenone by toluene and cumene J. Am. Chem. Soc. 83 2795-9
27. Hammond G S and Moore W M 1959 The role of a triplet state in the photoreduction of benzophenone J. Am. Chem. Soc. 81 6334
28. Moore W M, Hammond G S and Foss R P 1961 Mechanisms of photoreactions in solutions: I. Reduction of benzophenone by benzhydrol J. Am. Chem. Soc. 83 2789-94
29. Chatgilialoglu C, Scaiano J C and Ingold K U 1982 Absolute rate constants for the reactions of tert-butoxyl radicals and some ketone triplets with silanes Organometallics 1 466-9
30. Unger M A, Chou H, Thorsen T, Scherer A and Quake S R 2000 Monolithic microfabricated valves and pumps by multilayer soft lithography Science 288 113-6