Hybrid sputtering-remote PECVD deposition of Au nanoparticles on SiO 2 layers for surface plasmon resonance-based colored coatings

Plasma Processes and Polymers

Volumn 7, Issue 8, 2010, Pages 657-664

  Beyene, Haue Takele ^a,d   Tichelaar, Frans D ^b   Peeters, Paul ^c   Kolev, Ivan ^c   Van De Sanden, Mauritius C M ^d   Creatore, Mariadriana ^d  

^a MATERIALS INNOVATION INSTITUTE M2I   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c Hauzer Techno Coating BV   (Netherlands)

^d EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Au nanoparticles; Composite layers; Magnetron sputtering; PECVD; SiO 2

Indexed keywords

AU NANOPARTICLE; COLORED COATINGS; COMPOSITE LAYER; DIELECTRIC LAYER; EXPANDING THERMAL PLASMAS; FILM DENSITY; GOLD NANOPARTICLES; HYBRID SPUTTERING; METAL NANOPARTICLES; METAL SURFACES; NANOPARTICLE SIZES; PECVD; REMOTE-PECVD; RF-MAGNETRON SPUTTERING; RUTHERFORD BACK-SCATTERING; SIO 2; SURFACE PLASMONS; UNIFORM DISTRIBUTION; UV-VIS-NIR; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

CHEMICAL VAPOR DEPOSITION; COATINGS; GOLD COATINGS; GOLD DEPOSITS; HYBRID SYSTEMS; MAGNETRON SPUTTERING; NANOPARTICLES; OPTICAL PROPERTIES; PLASMA DEPOSITION; PLASMONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE PLASMON RESONANCE; TRANSMISSION ELECTRON MICROSCOPY;

GOLD;

EID: 77956241621     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201000003     Document Type: Article

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