Form measurements of micro-holes

Measurement Science and Technology

Volumn 18, Issue 11, 2007, Pages 3603-3611

  Kao, Chen Chun ^a   Shih, Albert J ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Coordinate measurement machine; Gauge R R; Micro hole measurement

Indexed keywords

COMPUTATION THEORY; ELECTRIC DISCHARGE MACHINING; FUEL INJECTION; SENSORS;

COORDINATE MEASUREMENT MACHINE; GAUGE R & R; MICRO-HOLE MEASUREMENT;

COORDINATE MEASURING MACHINES;

COMPUTATION THEORY; COORDINATE MEASURING MACHINES; ELECTRIC DISCHARGE MACHINING; FUEL INJECTION; SENSORS;

EID: 36249026128     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/11/045     Document Type: Article

References (25)

1. Masuzawa T, Hamasaki Y and Fujino M 1993 Vibroscanning method for nondestructive measurement of small holes Ann. CIRP 42 589-92
2. Masuzawa T, Tsukamoto J and Fujino M 1989 Drilling of deep microholes by EDM Ann. CIRP 38 195-8
3. Giedl R, Helml H J, Wagner F X and Wild M J 2003 Geometrical aspects of laser-drilled high precision holes for flow control applications Proc. SPIE 5063, 4th Int. Symp. on Laser Precision Microfabrication (Bellingham, USA, 2003) pp 389-94
4. Ahmed M S and Duffield A 1989 Deep hole drilling using ECM SME Tech Paper MS89-816 1-16
5. Iwata K and Moriwaki T 1981 Basic study of high speed micro deep drilling Ann. CIRP 30 27-30
6. Adler U 1994 Diesel Fuel Injection (Stuttgart: Robert Bosch GmbH)
7. Hebbar R R 1992 Micro-hole drilling by electrical discharge machining PhD Dissertation Purdue University
8. Morita H, Ohyama S and Mohri N 2000 Electrical discharge device with direct drive method for thin wire electrode SAE Tech Paper 2000-01-1085
9. Holt D J 2004 The Diesel Engine (Warrendale: SAE) pp 257-65
10. Johnson T V 2003 Diesel emission control in review-the last 12 months SAE Tech Paper 2003-01-0039
11. Kim B J, Masuzawa T, Fujita H and Tominaga A 1998 Dimensional measurement of microholes with silicon-based micro twin probes Proc. IEEE Micro Electro Mechanical Systems (MEMS) (Heidelberg, Germany, 1998) pp 334-9
12. Yamamoto M, Kanno I and Aoki S 2000 Profile measurement of high aspect ratio micro structures using tungsten carbide micro cantilever coated with PZT thin films Proc. IEEE Micro Electro Mechanical Systems (MEMS) (Miyazaki, Japan, 2000) pp 217-22
13. Diver C, Atkinson J, Helml H J and Li L 2004 Micro-EDM drilling of tapered holes for industrial applications J. Mater. Process. Technol. 149 296-303
14. Masuzawa T, Kim B J, Bergaud C and Fujino M 1997 Twin-probe vibroscanning method for dimensional measurement of microholes Ann. CIRP 46 437-40
15. Kim B J, Masuzawa T and Bourouina T 1999 The vibroscanning method for the measurement of micro-hole profiles Meas. Sci. Technol. 10 697-705
16. Lebrasseur E, Pourciel J B, Bourouina T, Masuzawa T and Fujita H 2002 A new characterization tool for vertical profile measurement of high-aspect-ratio microstructures J. Micromech. Microeng. 12 280-5
17. Pourciel J B, Lebrasseur E, Bourouina T, Masuzawa T and Fujita H 2001 Microsystem tool for microsystems characterization profile measurement of high aspect-ratio microstructures Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II (Adelaide, Australia, 2001) pp 244-51
18. Pourciel J B, Jalabert L and Masuzawa T 2003 Profile and surface measurement tool for high aspect-ratio microstructures JSME Int J. C 46 916-22
19. Christoph R 2004 Multisensor coordinate metrology: flexible measurements of form size and location VDI-Ber. 1860 157-63
20. Kao C C and Shih A J 2006 Sub-nanosecond monitoring of micro-hole electrical discharge machining pulses and modeling of discharge ringing Int. J. Mach. Tools Manuf. 46 1996-2008
21. Stackhouse J 1993 Abrasive flow machining SME Tech Paper MR93-148 1-15
22. Loveless T R, Williams R E and Rajurkar K P 1994 Study of the effects of abrasive-flow finishing on various machined surfaces J. Mater. Process. Technol. 47 133-51
23. Perry W B 1986 Abrasive flow machining principles and practices Nontraditional Machining Conf. Proc. (Cincinnati, USA, 1986) pp 121-7
24. Automotive Industry Action Group 1990 Measurement Systems Analysis Reference Manual 1st edn (Southfield, MI: AIAG)
25. Osborne M R 1985 Finite Algorithms in Optimization and Data Analysis (Chichester: Wiley)