Development of a virtual probe tip with an application to high aspect ratio microscale features

Review of Scientific Instruments

Volumn 76, Issue 9, 2005, Pages

  Bauza, Marcin B ^a,b   Hocken, Robert J ^b   Smith, Stuart T ^b   Woody, Shane C ^a  

^a InsituTec Inc   (United States)

^b UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCALE FEATURES; NONDESTRUCTIVE MEASUREMENT; SCANNERS; VIRTUAL PROBE TIP;

ADHESION; ATOMIC FORCE MICROSCOPY; BANDWIDTH; MICROMETERS; NONDESTRUCTIVE EXAMINATION; OSCILLATIONS; OSCILLATORS (ELECTRONIC); SCANNING; SCANNING ELECTRON MICROSCOPY; SURFACE PHENOMENA;

ASPECT RATIO;

EID: 25844495362     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2052027     Document Type: Article

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