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Volumn 97, Issue 6, 2010, Pages

Ultraviolet radiation effects on paramagnetic defects in low- κ dielectrics for ultralarge scale integrated circuit interconnects

(3) Bittel, B C a Lenahan, P M a King, S W b

a PENNSYLVANIA STATE UNIVERSITY (United States)

b INTEL CORPORATION (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL PROBLEMS; DEEP-LEVEL DEFECTS; ELECTRICAL MEASUREMENT; ELECTRON SPIN RESONANCE; ETCH-STOP LAYERS; INTER-LAYER DIELECTRICS; PARAMAGNETIC DEFECTS; ULTRALARGE-SCALE INTEGRATED CIRCUITS; ULTRAVIOLET CURING; ULTRAVIOLET EXPOSURE;

DIELECTRIC MATERIALS; ELECTRONIC PROPERTIES; INTEGRATED CIRCUITS; LEAKAGE CURRENTS; RADIATION EFFECTS; SPIN DYNAMICS; ULTRAVIOLET RADIATION;

LEAKAGE (FLUID);

EID: 77955726804 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3478235 Document Type: Article

Times cited : (30)

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