Moisture influence on porous low-k reliability

IEEE Transactions on Device and Materials Reliability

Volumn 6, Issue 2, 2006, Pages 169-174

  Michelon, Julien ^a   Hoofman, Romano J O M ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Moisture; Porous low k; Reliability

Indexed keywords

DIELECTRIC PROPERTIES; ELECTRIC FIELDS; LEAKAGE CURRENTS; MOISTURE; RELIABILITY; SEMICONDUCTING MANGANESE COMPOUNDS;

DIELECTRIC RELIABILITY; POROUS LOW-K; SIOC LOW-K MATERIALS;

POROUS MATERIALS;

EID: 33748123944     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2006.877365     Document Type: Conference Paper

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