Influence of the plasma expansion dynamics on the structural properties of pulsed laser ablation deposited tin oxide thin films

Thin Solid Films

Volumn 518, Issue 19, 2010, Pages 5409-5415

  Trusso, S ^a   Fazio, B ^a   Fazio, E ^b   Neri, F ^b   Barreca, F ^c  

^a CNR   (Italy)

^b UNIVERSITY OF MESSINA   (Italy)

^c Advanced and Nano Materials Research Srl   (Italy)

Author keywords

Plasma expansion; Pulsed laser ablation; Tin oxide

Indexed keywords

DEPOSITED FILMS; FAST PHOTOGRAPHY; FOURIER TRANSFORM INFRARED ABSORPTION SPECTROSCOPY; FREE EXPANSIONS; IN-VACUUM; LASER GENERATED PLASMAS; OXYGEN GAS; OXYGEN PARTIAL PRESSURE; OXYGEN PRESSURE; PLASMA EXPANSION; PULSED LASER ABLATION; STOICHIOMETRIC FILMS; STRUCTURAL AND MORPHOLOGICAL PROPERTIES; SUBSTRATE TEMPERATURE; SUBSTRATES TEMPERATURE; TIME-RESOLVED; TIN OXIDE THIN FILM; X-RAY PHOTOELECTRONS;

ABSORPTION SPECTROSCOPY; EXPANSION; FOURIER TRANSFORMS; GAS ABSORPTION; LASER ABLATION; LASER APPLICATIONS; OXIDE FILMS; OXYGEN; PHOTOELECTRON SPECTROSCOPY; PLASMAS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SHOCK WAVES; SUBSTRATES; THIN FILMS; TIN; TIN OXIDES; TITANIUM COMPOUNDS; VAPOR DEPOSITION;

PULSED LASERS;

EID: 77955663844     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.03.067     Document Type: Article

References (36)

1. R. Dolbec, M.A. El Khakani, A.M. Serventi, and R.G. Saint-Jacques Thin Solid Films 419 2002 23
2. S. Nicoletti, L. Dori, G. Cardinali, and A. Parisini Sens. Actuators. B 60 1999 90
3. W. Schmid, N. Barsan, and U. Weimar Sens. Actuators. B 103 2004 362
4. A. Pereira, L. Cultrera, A. Dima, M. Susu, A. Perrone, H.L. Du, A.O. Volkov, R. Cutting, and P.K. Datta Thin Solid Films 497 2006 142
5. Y. Matsui, M. Mitsuhashi, and Y. Goto Surf. Coat. Technol. 169/170 2003 549
6. G. Korotcenkov, V. Brinzari, J. Schwank, M. Di Battista, and A. Vasiliev Sens. Actuators. B Chem. 77 2001 244
7. A. Dieguez, A. Romano-Rodrguez, J.R. Morante, J. Kappler, N. Barsan, and W. Gopel Sens. Actuators. B 60 1999 125
8. A. Cricenti, R. Generosi, M.A. Scarcelli, P. Perfetti, A. Siciliano, A. Serra, A. Tepore, C. Coluzza, J. Almeida, and G. Margaritondo J. Phys. D 29 1999 2235
9. Z.W. Chen, J.K.L. Lai, C.H. Shek, and H.D. Chen J. Solid State Chem. 178 2005 892
10. R. Khandelwal, A.P. Singh, A. Kapoor, S. Grigorescu, P. Miglietta, N.E. Stankova, and A. Perrone Opt. Laser Technol. 41 2009 89
11. J.S. Horwitz, and J.A. Sprague D.B. Chrisey, G.K. Hubler, Pulsed Laser Deposition of Thin Films 1994 Wiley New York 229
12. D.H.H. Hoffmann, A. Blazevic, P. Ni, O. Rosmei, M. Roth, N.A. Tair, A. Tauschwitz, S. Udrea, D. Varentsov, K. Weyrich, and Y. Maron Laser Part. Beams 23 2005 47
13. J. Gonzalo, C.N. Afonso, and I. Madariaga J. Appl. Phys. 81 1997 951
14. S.B. Wen, X. Mao, R. Grief, and R.E. Russo J. Appl. Phys. 101 2007 023114
15. S. Amoruso, R. Bruzzese, N. Spinelli, R. Velotta, M. Vitiello, and X. Wang Phys. Rev. B 67 2003 224503
16. A.K. Sharma, and R.K. Thareja Appl. Surf. Sci. 243 2005 68
17. R.F. Wood, K.R. Chen, J.N. Lebouef, A.A. Puretzky, and D.B. Geohegan Phys. Rev. Lett. 79 1997 1571
18. A. Bailini, and P.M. Ossi Europhys. Lett. 79 2007 35002
19. S. Trusso, E. Barletta, F. Barreca, and F. Neri Appl. Phys. A: Mater. Sci. Process. 79 2004 1997
20. A.A. Voevodin, J.G. Jones, J.S. Zabinski, Z. Czigany, and L. Hultman J. Appl. Phys. 92 2002 4980
21. S. Trusso, E. Barletta, F. Barreca, E. Fazio, and F. Neri Laser Part. Beams 23 2005 149
22. E. Fazio, F. Neri, P.M. Ossi, N. Santo, and S. Trusso Laser Part. Beams 27 2009 281
23. R. Savu, and E. Joanni Thin Solid Films 515 2007 7813
24. M. Kwoka, L. Ottaviano, M. Passacantando, S. Santucci, G. Czempika, and J. Szuber Thin Solid Films 490 2005 36
25. F. Gu, S.F. Wang, C.F. Song, M.K. Lü, Y.X. Qi, G.J. Zhou, D. Xu, and D.R. Yan Chem. Phys. Lett. 372 2003 451
26. P.S. Patil, R.K. Kawar, T. Seth, D.P. Amalnekar, and P.S. Chigare Ceram. Int. 29 2003 725
27. V. Cracium, C. Chiritescu, F. Kelly, and R.K. Singh J. Optoelectron. Adv. Mater. 4 2002 21
28. A. Bailini, and P.M. Ossi Appl. Surf. Sci. 253 2007 7682
29. Y.B. Zel'dovich, and Y.P. Raizer Physics of Shock Waves and High Temperature Hydrodynamic Phenomena 1966 Academic Press New-York NY
30. N. Arnold, J. Gruber, and J. Heitz Appl. Phys. A: Mater. Sci. Process. 69 1999 S87
31. S. Amoruso, J. Schou, and J.G. Lunney Appl. Phys. A: Mater. Sci. Process. 92 2008 907
32. A. Sambri, S. Amoruso, X. Wang, M. Radovic', F. Miletto Granozio, and R. Bruzzese Appl. Phys. Lett. 91 2007 151501
33. A. Sambri, S. Amoruso, X. Wang, F. Miletto Granozio, and R. Bruzzese J. Appl. Phys. 104 2008 053304
34. A. Misra, and R.K. Thareja Appl. Phys. Lett. 74 1999 929
35. H. Fan, W. Ho, and S.A. Reid Int. J. Mass Spectrosc. 230 2007 11
36. A. Bailini, F. Di Fonzo, M. Fusi, C.S. Casari, A. Li Bassi, V. Russo, A. Baserga, and C.E. Bottani Appl. Surf. Sci. 253 2007 8130