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Volumn 518, Issue 17, 2010, Pages 4791-4797

Thin film deposition and characterization of pure and iron-doped electron-beam evaporated tungsten oxide for gas sensors

(4) Tesfamichael, Tuquabo a Arita, Masashi b Bostrom, Thor a Bell, John a

a QUEENSLAND UNIVERSITY OF TECHNOLOGY (Australia)

b HOKKAIDO UNIVERSITY (Japan)

Author keywords

Atomic force microscopy; Co evaporated thin films; Electron beam evaporation; Optical properties; Surface characterization; Surface morphology; Tungsten oxide; X ray photoelectron spectroscopy

Indexed keywords

AFM; ALUMINA SUBSTRATES; ANNEALED FILMS; BAND GAP ENERGY; CO-EVAPORATED; CRYSTALLINITIES; ELECTRON BEAM EVAPORATION; FE FILMS; GAS SELECTIVITY; GAS SENSING APPLICATIONS; GAS SENSITIVITY; GAS SENSORS; HIGH VACUUM; IRON-DOPED; NANOSTRUCTURED THIN FILM; NOISE SPECTROSCOPY; OPTICAL BAND GAP ENERGY; PURE TUNGSTEN; ROOM TEMPERATURE; SURFACE CHARACTERIZATION; THIN-FILM DEPOSITIONS; TUNGSTEN OXIDE; TUNGSTEN OXIDE FILMS;

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; ATOMS; COBALT; DEPOSITION; DOPING (ADDITIVES); ELECTRON BEAMS; ELECTRON OPTICS; ELECTRONS; ENERGY GAP; EVAPORATION; GAS DETECTORS; GAS SENSING ELECTRODES; METALLIC FILMS; MORPHOLOGY; OPTICAL PROPERTIES; OXIDES; PHOTOELECTRICITY; PHOTONS; RAMAN SPECTROSCOPY; SENSORS; STOICHIOMETRY; SURFACE MORPHOLOGY; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILMS; TUNGSTEN; TUNGSTEN COMPOUNDS; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

OXIDE FILMS;

EID: 77955661466 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2010.01.037 Document Type: Article

Times cited : (41)

References (32)

1
- 0030081380
- C. Cantalini, H.T. Sun, M. Faccio, M. Pelino, S. Santucci, L. Lozzi, and M. Passacantando Sens. Actuators, B 31 1996 81
- (1996) Sens. Actuators, B , vol.31 , pp. 81
- Cantalini, C.¹ Sun, H.T.² Faccio, M.³ Pelino, M.⁴ Santucci, S.⁵ Lozzi, L.⁶ Passacantando, M.⁷

2
- 4243064100
- R. Sivakumar, M. Jayachandran, and C. Sanjeeviraja Mater. Chem. Phys. 87 2004 439
- (2004) Mater. Chem. Phys. , vol.87 , pp. 439
- Sivakumar, R.¹ Jayachandran, M.² Sanjeeviraja, C.³

3
- 46449094841
- T. Siciliano, A. Tepore, G. Micocci, A. Serra, D. Manno, and E. Filippo Sens. Actuators, B 133 2008 321
- (2008) Sens. Actuators, B , vol.133 , pp. 321
- Siciliano, T.¹ Tepore, A.² Micocci, G.³ Serra, A.⁴ Manno, D.⁵ Filippo, E.⁶

4
- 0042735108
- Y.-G. Choi, G. Sakai, K. Shimanoe, N. Miura, and N. Yamazoe Sens. Actuators, B 95 2003 258
- (2003) Sens. Actuators, B , vol.95 , pp. 258
- Choi, Y.-G.¹ Sakai, G.² Shimanoe, K.³ Miura, N.⁴ Yamazoe, N.⁵

5
- 3242812926
- A. Hoel, L.F. Reyes, P. Heszler, V. Lantto, and C.G. Granqvist Curr. Appl. Phys. 4 2004 547
- (2004) Curr. Appl. Phys. , vol.4 , pp. 547
- Hoel, A.¹ Reyes, L.F.² Heszler, P.³ Lantto, V.⁴ Granqvist, C.G.⁵

6
- 0031655836
- S.-K. Song, J.-S. Cho, W.-K. Choi, H.-J. Jung, D. Choi, J.-Y. Lee, H.-K. Baik, and S.-K. Koh Sens. Actuators, B 46 1998 42
- (1998) Sens. Actuators, B , vol.46 , pp. 42
- Song, S.-K.¹ Cho, J.-S.² Choi, W.-K.³ Jung, H.-J.⁴ Choi, D.⁵ Lee, J.-Y.⁶ Baik, H.-K.⁷ Koh, S.-K.⁸

7
- 29244431618
- M. Stankova, X. Vilanova, J. Calderer, E. Llobet, J. Brezmes, I. Gràcia, C. Cané, and X. Correig Sens. Actuators, B 113 2006 241
- (2006) Sens. Actuators, B , vol.113 , pp. 241
- Stankova, M.¹ Vilanova, X.² Calderer, J.³ Llobet, E.⁴ Brezmes, J.⁵ Gràcia, I.⁶ Cané, C.⁷ Correig, X.⁸

8
- 0029292572
- X. Wang, S.S. Yee, and W.P. Carey Sens. Actuators, B 25 1995 454
- (1995) Sens. Actuators, B , vol.25 , pp. 454
- Wang, X.¹ Yee, S.S.² Carey, W.P.³

9
- 0042735217
- G.G. Mandayo, E. Castaño, F.J. Gracia, A. Cirera, A. Cornet, and J.R. Morante Sens. Actuators, B 95 2003 90
- (2003) Sens. Actuators, B , vol.95 , pp. 90
- Mandayo, G.G.¹ Castaño, E.² Gracia, F.J.³ Cirera, A.⁴ Cornet, A.⁵ Morante, J.R.⁶

10
- 2342479792
- H. Kawasaki, T. Ueda, Y. Suda, and T. Ohshima Sens. Actuators, B 100 2004 266
- (2004) Sens. Actuators, B , vol.100 , pp. 266
- Kawasaki, H.¹ Ueda, T.² Suda, Y.³ Ohshima, T.⁴

11
- 25144503448
- V. Khatko, E. Llobet, X. Vilanova, J. Brezmes, J. Hubalek, K. Malysz, and X. Correig Sens. Actuators, B 111-112 2005 45
- (2005) Sens. Actuators, B , vol.111-112 , pp. 45
- Khatko, V.¹ Llobet, E.² Vilanova, X.³ Brezmes, J.⁴ Hubalek, J.⁵ Malysz, K.⁶ Correig, X.⁷

12
- 0037051225
- L.J. LeGore, R.J. Lad, S.C. Moulzolf, J.F. Vetelino, B.G. Frederick, and E.A. Kenik Thin Solid Films 406 2002 79
- (2002) Thin Solid Films , vol.406 , pp. 79
- Legore, L.J.¹ Lad, R.J.² Moulzolf, S.C.³ Vetelino, J.F.⁴ Frederick, B.G.⁵ Kenik, E.A.⁶

13
- 0038605871
- M.A. Ponce, C.M. Aldao, and M.S. Castro J. Eur. Ceram. Soc. 23 2003 2105
- (2003) J. Eur. Ceram. Soc. , vol.23 , pp. 2105
- Ponce, M.A.¹ Aldao, C.M.² Castro, M.S.³

14
- 0037199621
- J. Shieh, H.M. Feng, M.H. Hon, and H.Y. Juang Sens. Actuators, B 86 2002 75
- (2002) Sens. Actuators, B , vol.86 , pp. 75
- Shieh, J.¹ Feng, H.M.² Hon, M.H.³ Juang, H.Y.⁴

15
- 0034272628
- A. Rothschild, F. Edelman, Y. Komem, and F. Cosandey Sens. Actuators, B 67 2000 282
- (2000) Sens. Actuators, B , vol.67 , pp. 282
- Rothschild, A.¹ Edelman, F.² Komem, Y.³ Cosandey, F.⁴

16
- 0031363769
- D.H. Yoon, and G.M. Choi Sens. Actuators, B 45 1997 251
- (1997) Sens. Actuators, B , vol.45 , pp. 251
- Yoon, D.H.¹ Choi, G.M.²

17
- 0030084187
- L.E. Depero, I. Natali Sora, C. Perego, L. Sangaletti, and G. Sberveglieri Sens. Actuators, B 31 1996 19
- (1996) Sens. Actuators, B , vol.31 , pp. 19
- Depero, L.E.¹ Natali Sora, I.² Perego, C.³ Sangaletti, L.⁴ Sberveglieri, G.⁵

18
- 2342560587
- K. Zakrzewska Vacuum 74 2004 335
- (2004) Vacuum , vol.74 , pp. 335
- Zakrzewska, K.¹

19
- 33947169984
- G. Neri, A. Bonavita, G. Rizzo, S. Galvagno, N. Pinna, M. Niederberger, S. Capone, and P. Siciliano Sens. Actuators, B 122 2007 564
- (2007) Sens. Actuators, B , vol.122 , pp. 564
- Neri, G.¹ Bonavita, A.² Rizzo, G.³ Galvagno, S.⁴ Pinna, N.⁵ Niederberger, M.⁶ Capone, S.⁷ Siciliano, P.⁸

20
- 34848897587
- E. Comini, L. Pandolfi, S. Kaciulis, G. Faglia, and G. Sberveglieri Sens. Actuators, B 127 2007 22
- (2007) Sens. Actuators, B , vol.127 , pp. 22
- Comini, E.¹ Pandolfi, L.² Kaciulis, S.³ Faglia, G.⁴ Sberveglieri, G.⁵

21
- 77955655500
- Wiley New York, USA A.G.
- J.S. Bendat, and A.G. Piersil 2000 Wiley New York, USA
- (2000)
- Bendat, J.S.¹ Piersil, A.G.²

22
- 33845954935
- R. Sivakumar, R. Gopalakrishnan, M. Jayachandran, and C. Sanjeeviraja Opt. Mater. 29 2007 679
- (2007) Opt. Mater. , vol.29 , pp. 679
- Sivakumar, R.¹ Gopalakrishnan, R.² Jayachandran, M.³ Sanjeeviraja, C.⁴

23
- 0035898883
- L. Lozzi, L. Ottaviano, M. Passacantando, S. Santucci, and C. Cantalini Thin Solid Films 391 2001 224
- (2001) Thin Solid Films , vol.391 , pp. 224
- Lozzi, L.¹ Ottaviano, L.² Passacantando, M.³ Santucci, S.⁴ Cantalini, C.⁵

24
- 63149178465
- D. Gogova, L.K. Thomas, and B. Camin Thin Solid Films 517 2009 3326
- (2009) Thin Solid Films , vol.517 , pp. 3326
- Gogova, D.¹ Thomas, L.K.² Camin, B.³

25
- 35448997797
- T.G.G. Maffeis, D. Yung, L. LePennec, M.W. Penny, R.J. Cobley, E. Comini, G. Sberveglieri, and S.P. Wilks Surf. Sci. 601 2007 4953
- (2007) Surf. Sci. , vol.601 , pp. 4953
- Maffeis, T.G.G.¹ Yung, D.² Lepennec, L.³ Penny, M.W.⁴ Cobley, R.J.⁵ Comini, E.⁶ Sberveglieri, G.⁷ Wilks, S.P.⁸

26
- 40849136394
- A. Cremonesi, Y. Djaoued, D. Bersani, and P.P. Lottici Thin Solid Films 516 2008 4128
- (2008) Thin Solid Films , vol.516 , pp. 4128
- Cremonesi, A.¹ Djaoued, Y.² Bersani, D.³ Lottici, P.P.⁴

27
- 13844318341
- R. Boucher J. Phys. Chem. Solids 66 2005 906
- (2005) J. Phys. Chem. Solids , vol.66 , pp. 906
- Boucher, R.¹

28
- 77955661017
- Plenum Press London J.
- J. Tauc 1974 Plenum Press London
- (1974)
- Tauc, J.¹

29
- 19844381703
- A.Z. Moshfegh, R. Azimirad, and O. Akhavan Thin Solid Films 484 2005 124
- (2005) Thin Solid Films , vol.484 , pp. 124
- Moshfegh, A.Z.¹ Azimirad, R.² Akhavan, O.³

30
- 77955660354
- C.G. Granqvist 1995 Elsevier Amsterdam
- C.G. Granqvist 1995 Elsevier Amsterdam

31
- 18844414073
- L.G. Teoh, J. Shieh, W.H. Lai, and I.M. Hung J. Alloys Compd. 396 2005 251
- (2005) J. Alloys Compd. , vol.396 , pp. 251
- Teoh, L.G.¹ Shieh, J.² Lai, W.H.³ Hung, I.M.⁴

32
- 0033317557
- A. Rougier, F. Portemer, A. Quédé, and M. El Marssi Appl. Surf. Sci. 153 1999 1
- (1999) Appl. Surf. Sci. , vol.153 , pp. 1
- Rougier, A.¹ Portemer, F.² Quédé, A.³ El Marssi, M.⁴

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