NO2 sensitivity of WO3 thin film obtained by high vacuum thermal evaporation

Sensors and Actuators, B: Chemical

Volumn 31, Issue 1-2, 1996, Pages 81-87

  Cantalini, C ^a   Sun, H T ^a   Faccio, M ^a   Pelino, M ^a   Santucci, S ^a   Lozzi, L ^a   Passacantando, M ^a  

^a UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

High vacuum thermal evaporation; NO2 gas sensor; WO3 thin film

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITION; CRYSTAL ORIENTATION; ELECTRIC PROPERTIES; EVAPORATION; MORPHOLOGY; NITROGEN OXIDES; POWDERS; TUNGSTEN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLINE PHASE; DC CURRENT MODE; HIGH VACUUM THERMAL EVAPORATION; TUNGSTEN OXIDES;

THIN FILMS;

EID: 0030081380     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(96)80020-7     Document Type: Article

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