Programmable growth of branched silicon nanowires using a focused ion beam

Nano Letters

Volumn 10, Issue 8, 2010, Pages 2777-2782

  Jun, Kimin ^a,b   Jacobson, Joseph M ^a  

^a Center for Bits and Atoms   (United States)

^b Massachusetts Institute of Technology   (United States)

Author keywords

branch; Focused ion beam; galvanic displacement; nanowire; silicon; vapor liquid solid

Indexed keywords

BASE VECTORS; BRANCHING POINTS; COMPLEX STRUCTURE; COMPLICATED STRUCTURES; GALVANIC DISPLACEMENT; LINEAR COMBINATIONS; MATERIAL LAYERS; NANO CHANNELS; NANOWIRE GROWTH; NANOWIRE STRUCTURES; SILICON NANOWIRES; THREE-DIMENSIONAL (3D) SPACE; VAPOR-LIQUID-SOLID;

BEAM PLASMA INTERACTIONS; FOCUSED ION BEAMS; ION BOMBARDMENT; IONS; LIQUIDS; SINGLE CRYSTALS; THREE DIMENSIONAL; VAPORS; VECTOR SPACES; WIRE;

NANOWIRES;

EID: 77955575496     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl100662z     Document Type: Article

References (30)

1. Wang, D. L.; Lieber, C. M. Nat. Mater. 2003, 2 (6) 355-356
2. Bandaru, P. R.; Daraio, C.; Jin, S.; Rao, A. M. Nat. Mater. 2005, 4 (9) 663-666
3. Yang, C.; Barrelet, C. J.; Capasso, F.; Lieber, C. M. Nano Lett. 2006, 6 (12) 2929-2934
4. Manna, L.; Milliron, D. J.; Meisel, A.; Scher, E. C.; Alivisatos, A. P. Nat. Mater. 2003, 2 (6) 382-385
5. Wagner, R. S.; Doherty, C. J. J. Electrochem. Soc. 1968, 115 (1) 93
6. Dick, K. A.; Deppert, K.; Larsson, M. W.; Martensson, T.; Seifert, W.; Wallenberg, L. R.; Samuelson, L. Nat. Mater. 2004, 3 (6) 380-384
7. Wang, D.; Qian, F.; Yang, C.; Zhong, Z. H.; Lieber, C. M. Nano Lett. 2004, 4 (5) 871-874
8. Doerk, G. S.; Ferralis, N.; Carraro, C.; Maboudian, R. J. Mater. Chem. 2008, 18 (44) 5376-5381
9. Dick, K. A.; Deppert, K.; Karlsson, L. S.; Larsson, M. W.; Seifert, W.; Wallenberg, L. R.; Samuelson, L. MRS Bull. 2007, 32 (2) 127-133
10. Dick, K. A.; Deppert, K.; Karlsson, L. S.; Seifert, W.; Wallenberg, L. R.; Samuelson, L. Nano Lett. 2006, 6 (12) 2842-2847
11. Reyntjens, S.; Puers, R. J. Micromech. Microeng. 2001, 11 (4) 287-300
12. Stevie, F. A.; Shane, T. C.; Kahora, P. M.; Hull, R.; Bahnck, D.; Kannan, V. C.; David, E. Surf. Interface Anal. 1995, 23 (2) 61-68
13. Bell, D. C.; Lemme, M. C.; Stern, L. A.; Rwilliams, J.; Marcus, C. M. Nanotechnology 2009, 20 (45) 5
14. Jun, K.; Joo, J.; Jacobson, J. M. J. Vac. Sci. Technol., B 2009, 27 (6) 3043-3047
15. Magagnin, L.; Maboudian, R.; Carraro, C. J. Phys. Chem. B 2002, 106 (2) 401-407
16. Gao, D.; He, R. R.; Carraro, C.; Howe, R. T.; Yang, P. D.; Maboudian, R. J. Am. Chem. Soc. 2005, 127 (13) 4574-4575
17. San Paulo, A.; Arellano, N.; Plaza, J. A.; He, R. R.; Carraro, C.; Maboudian, R.; Howe, R. T.; Bokor, J.; Yang, P. D. Nano Lett. 2007, 7 (4) 1100-1104
18. Madou, M. J. Fundamentals of microfabrication: the science of miniaturization, 2nd ed.; CRC Press: Boca Raton, FL, 2002.
19. Porter, L. A.; Choi, H. C.; Schmeltzer, J. M.; Ribbe, A. E.; Elliott, L. C. C.; Buriak, J. M. Nano Lett. 2002, 2 (12) 1369-1372
20. Schmidt, V.; Senz, S.; Gosele, U. Nano Lett. 2005, 5 (5) 931-935
21. Kelzenberg, M. D.; Turner-Evans, D. B.; Kayes, B. M.; Filler, M. A.; Putnam, M. C.; Lewis, N. S.; Atwater, H. A. Nano Lett. 2008, 8 (2) 710-714
22. Givargizov, E. I. J. Cryst. Growth 1975, 31, 20-30
23. Ziegler, J. F.; Ziegler, M. D.; Biersack, J. P. SRIM 2008. www.srim.org.
24. Coburn, J. W.; Winters, H. F. J. Appl. Phys. 1979, 50 (5) 3189-3196
25. Shedd, G. M.; Lezec, H.; Dubner, A. D.; Melngailis, J. Appl. Phys. Lett. 1986, 49 (23) 1584-1586
26. Dick, K. A.; Kodambaka, S.; Reuter, M. C.; Deppert, K.; Samuelson, L.; Seifert, W.; Wallenberg, L. R.; Ross, F. M. Nano Lett. 2007, 7 (6) 1817-1822
27. Lieber, C. M.; Wang, Z. L. MRS Bull. 2007, 32 (2) 99-108
28. Fan, R.; Wu, Y. Y.; Li, D. Y.; Yue, M.; Majumdar, A.; Yang, P. D. J. Am. Chem. Soc. 2003, 125 (18) 5254-5255
29. Shir, D.; Liu, B. Z.; Mohammad, A. M.; Lew, K. K.; Mohney, S. E. J. Vac. Sci. Technol., B 2006, 24 (3) 1333-1336
30. Li, J.; Stein, D.; McMullan, C.; Branton, D.; Aziz, M. J.; Golovchenko, J. A. Nature 2001, 412 (6843) 166-169