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Volumn 48, Issue 11, 2010, Pages 1067-1075

Deformation analysis of MEMS structures by modified digital moir methods

Author keywords

Digital phase shifting; Gaussian blur; Geometrical phase analysis; MEMS; Moir

Indexed keywords

DEFORMATION ANALYSIS; DEFORMATION BEHAVIOUR; DIGITAL PHASE-SHIFTING; DIGITAL REFERENCE; ELECTROMECHANICAL SYSTEMS; EXPERIMENTAL PROCEDURE; FRINGE PATTERN; FUNCTIONAL CONTROL; GAUSSIAN BLUR; GAUSSIANS; GEOMETRICAL PHASE ANALYSIS; MEMS-STRUCTURE; MICROELECTROMECHANICAL SYSTEMS; PHASE DISTRIBUTION; PROCESSING METHOD; SPECIMEN GRATING;

EID: 77955550454     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2009.12.007     Document Type: Article
Times cited : (20)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.