Focused ion beam Moiré method

Optics and Lasers in Engineering

Volumn 40, Issue 3, 2003, Pages 163-177

  Xie, Huimin ^a   Li, Biao ^b   Geer, Robert ^b   Xu, Bai ^b   Castracane, James ^b  

^a TSINGHUA UNIVERSITY   (China)

^b STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

FIB Moir method; High frequency grating; In plane deformation; MEMS; Strain

Indexed keywords

DEFORMATION; DIFFRACTION GRATINGS; ION BEAMS; LIGHT INTERFERENCE; MICROELECTROMECHANICAL DEVICES; RESIDUAL STRESSES;

MICROCANTILEVERS;

MOIRE FRINGES;

EID: 0037412068     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(02)00099-4     Document Type: Article

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