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Volumn 34, Issue 4, 2010, Pages 692-700

A review, supported by experimental results, of voltage, charge and capacitor insertion method for driving piezoelectric actuators

Author keywords

Capacitor insertion; Charge; Creep; Hysteresis; Piezoelectric actuator; Voltage

Indexed keywords

CHARGE; CREEP HYSTERESIS; INSERTION METHODS; NEGATIVE POTENTIAL; NON-LINEAR; VOLTAGE INPUT;

EID: 77955417479     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2010.03.006     Document Type: Article
Times cited : (122)

References (48)
  • 1
    • 22444443344 scopus 로고    scopus 로고
    • A charge controller for linear operation of a piezoelectric stack actuator
    • K.A. Yi, and R.J. Viellette A charge controller for linear operation of a piezoelectric stack actuator IEEE Trans Control Syst Technol 13 4 2005 517 526
    • (2005) IEEE Trans Control Syst Technol , vol.13 , Issue.4 , pp. 517-526
    • Yi, K.A.1    Viellette, R.J.2
  • 5
    • 0034289143 scopus 로고    scopus 로고
    • Dynamic modeling and controller design for a piezoelectric actuation system used for machine tool control
    • P. Mayhan, K. Srinivasan, S. Watechagit, and G. Washington Dynamic modeling and controller design for a piezoelectric actuation system used for machine tool control J Intell Mater Syst Struct 11 10 2000 771 780
    • (2000) J Intell Mater Syst Struct , vol.11 , Issue.10 , pp. 771-780
    • Mayhan, P.1    Srinivasan, K.2    Watechagit, S.3    Washington, G.4
  • 8
    • 0027239269 scopus 로고
    • Hybrid active vibration control of rotor bearing systems using piezoelectric actuators
    • A. Palazzolo, S. Jagannathan, A. Kascak, G. Montague, and L. Kiraly Hybrid active vibration control of rotor bearing systems using piezoelectric actuators J Vib Acoust 115 1993 111 119
    • (1993) J Vib Acoust , vol.115 , pp. 111-119
    • Palazzolo, A.1    Jagannathan, S.2    Kascak, A.3    Montague, G.4    Kiraly, L.5
  • 9
    • 0025457932 scopus 로고
    • A micro-positioning tool post using a piezoelectric actuator for diamond turning machines
    • Y. Okazaki A micro-positioning tool post using a piezoelectric actuator for diamond turning machines Prec Eng 12 3 1990 151 156
    • (1990) Prec Eng , vol.12 , Issue.3 , pp. 151-156
    • Okazaki, Y.1
  • 10
    • 0000966329 scopus 로고    scopus 로고
    • A lumped parameter electromechanical model for describing the nonlinear behaviour of piezoelectric actuators
    • M. Goldfarb, and N. Celanovic A lumped parameter electromechanical model for describing the nonlinear behaviour of piezoelectric actuators J Dyn Syst Meas Control Trans ASME 119 1997 478 485
    • (1997) J Dyn Syst Meas Control Trans ASME , vol.119 , pp. 478-485
    • Goldfarb, M.1    Celanovic, N.2
  • 11
    • 84866546007 scopus 로고
    • Piezoelectricity: Its history and applications
    • W.P. Mason Piezoelectricity: its history and applications J Acoust Soc Am 70 6 1981 1561 1566
    • (1981) J Acoust Soc Am , vol.70 , Issue.6 , pp. 1561-1566
    • Mason, W.P.1
  • 15
    • 0032261072 scopus 로고    scopus 로고
    • An analytical description of slow hysteresis in polarized ferroelectric ceramic actuators
    • L. Huang, and H. Tiersten An analytical description of slow hysteresis in polarized ferroelectric ceramic actuators J Intell Mater Syst Struct 9 1998 417 426
    • (1998) J Intell Mater Syst Struct , vol.9 , pp. 417-426
    • Huang, L.1    Tiersten, H.2
  • 16
    • 0036885415 scopus 로고    scopus 로고
    • Hysteresis in mechanical systems - Modeling and dynamic response
    • F. Vestroni, and M. Noori Hysteresis in mechanical systems - modeling and dynamic response Int J Non Linear Mech 37 2002 1261 1262
    • (2002) Int J Non Linear Mech , vol.37 , pp. 1261-1262
    • Vestroni, F.1    Noori, M.2
  • 17
    • 22844442611 scopus 로고    scopus 로고
    • Hysteresis and creep compensation for piezoelectric actuator in open-loop operation
    • R. Changhai, and S. Lining Hysteresis and creep compensation for piezoelectric actuator in open-loop operation Sens Actuators A 122 1 2005 124 130
    • (2005) Sens Actuators A , vol.122 , Issue.1 , pp. 124-130
    • Changhai, R.1    Lining, S.2
  • 18
    • 0002199949 scopus 로고    scopus 로고
    • Hysteresis and vibration compensation for piezo actuators: Atomic force microscopy application
    • D. Croft, G. Shed, S. Devasia, and Creep Hysteresis and vibration compensation for piezo actuators: atomic force microscopy application J Dyn Syst Meas Control 123 1 2001 35 43
    • (2001) J Dyn Syst Meas Control , vol.123 , Issue.1 , pp. 35-43
    • Croft, D.1    Shed, G.2    Devasia, S.3    Creep4
  • 19
    • 0001024297 scopus 로고
    • Optical scan-correction system applied to atomic force microscopy
    • R. Barrett, and C. Quate Optical scan-correction system applied to atomic force microscopy Rev Sci Instrum 62 6 1991 1393 1399
    • (1991) Rev Sci Instrum , vol.62 , Issue.6 , pp. 1393-1399
    • Barrett, R.1    Quate, C.2
  • 20
    • 0005288636 scopus 로고
    • Development of a precision diamond turning machine for fabrication of asymmetric aspheric mirrors
    • S. Moriyama, F. Uchida, and E. Seya Development of a precision diamond turning machine for fabrication of asymmetric aspheric mirrors Opt Eng 27 11 1988 1008 1012
    • (1988) Opt Eng , vol.27 , Issue.11 , pp. 1008-1012
    • Moriyama, S.1    Uchida, F.2    Seya, E.3
  • 22
    • 1542342698 scopus 로고    scopus 로고
    • Hysteresis creep and vibration compensation for piezo actuators: Feedback and feedforward control
    • K.K. Leang, and S. Devasia Hysteresis creep and vibration compensation for piezo actuators: feedback and feedforward control Proc. 2nd IFAC conf mechatronic syst 2002 283 289
    • (2002) Proc. 2nd IFAC Conf Mechatronic Syst , pp. 283-289
    • Leang, K.K.1    Devasia, S.2
  • 23
    • 0032201850 scopus 로고    scopus 로고
    • Determination of room-temperature tensile creep of PZT
    • T. Fett, and G. Thun Determination of room-temperature tensile creep of PZT J Mater Sci Lett 17 1998 1929 1931
    • (1998) J Mater Sci Lett , vol.17 , pp. 1929-1931
    • Fett, T.1    Thun, G.2
  • 24
    • 0000611058 scopus 로고
    • Mathematical models of hysteresis
    • I. Mayergoyz Mathematical models of hysteresis Phys Rev Lett 56 1986 1518 1521
    • (1986) Phys Rev Lett , vol.56 , pp. 1518-1521
    • Mayergoyz, I.1
  • 26
    • 84969204387 scopus 로고    scopus 로고
    • Robust control design for a piezoelectric actuator system with dominant hysteresis
    • C. Jan, and C. Hwang Robust control design for a piezoelectric actuator system with dominant hysteresis IEEE Int Conf Ind Electron Instrum 2000 1515 1520
    • (2000) IEEE Int Conf Ind Electron Instrum , pp. 1515-1520
    • Jan, C.1    Hwang, C.2
  • 27
    • 0035111980 scopus 로고    scopus 로고
    • Analysis and control of monolithic piezoelectric nano-actuator
    • T. Chang, and X. Sun Analysis and control of monolithic piezoelectric nano-actuator IEEE Trans Control Syst Technol 9 2001 69 75
    • (2001) IEEE Trans Control Syst Technol , vol.9 , pp. 69-75
    • Chang, T.1    Sun, X.2
  • 28
    • 18844429465 scopus 로고    scopus 로고
    • Tracking control of a piezoceramic actuator with hysteresis compensating using inverse Preisach model
    • G. Song, J. Zhao, X. Zhou, and J. Abreu-Garcia Tracking control of a piezoceramic actuator with hysteresis compensating using inverse Preisach model IEEE/ASME Trans Mechatron 10 2 2005 198 209
    • (2005) IEEE/ASME Trans Mechatron , vol.10 , Issue.2 , pp. 198-209
    • Song, G.1    Zhao, J.2    Zhou, X.3    Abreu-Garcia, J.4
  • 29
    • 0036466752 scopus 로고    scopus 로고
    • Adaptive motion control using neural network approximations
    • S. Huang, K. Tan, and T. Lee Adaptive motion control using neural network approximations Automatica 38 2 2002 227 233
    • (2002) Automatica , vol.38 , Issue.2 , pp. 227-233
    • Huang, S.1    Tan, K.2    Lee, T.3
  • 30
    • 12344337544 scopus 로고    scopus 로고
    • Trajectory tracking of large displacement piezoelectric actuator using a nonlinear observer-based variable structure control
    • C. Hwang, Y. Chen, and J. Chan Trajectory tracking of large displacement piezoelectric actuator using a nonlinear observer-based variable structure control IEEE Trans Control Syst Technol 13 1 2005 56 66
    • (2005) IEEE Trans Control Syst Technol , vol.13 , Issue.1 , pp. 56-66
    • Hwang, C.1    Chen, Y.2    Chan, J.3
  • 31
    • 55149086220 scopus 로고    scopus 로고
    • An open-loop method for point-to-point positioning of a piezoelectric actuator
    • N. Henmi, and M. Tanaka An open-loop method for point-to-point positioning of a piezoelectric actuator Int J Precis Eng Manuf 8 2 2007 9 13
    • (2007) Int J Precis Eng Manuf , vol.8 , Issue.2 , pp. 9-13
    • Henmi, N.1    Tanaka, M.2
  • 32
    • 0030150149 scopus 로고    scopus 로고
    • Tracking control of a piezoceramic actuator
    • P. Ge, and M. Jouaneh Tracking control of a piezoceramic actuator IEEE Trans Control Syst Technol 4 3 1996 209 216
    • (1996) IEEE Trans Control Syst Technol , vol.4 , Issue.3 , pp. 209-216
    • Ge, P.1    Jouaneh, M.2
  • 33
    • 0020128096 scopus 로고
    • Improving the linearity of piezoelectric ceramic actuators
    • C.V. Newcomb, and I. Flinn Improving the linearity of piezoelectric ceramic actuators IEEE Electron Lett 18 11 1982 442 1442
    • (1982) IEEE Electron Lett , vol.18 , Issue.11 , pp. 442-1442
    • Newcomb, C.V.1    Flinn, I.2
  • 35
    • 0029370430 scopus 로고
    • Precision position control of piezoelectric actuators using charge feedback
    • J.A. Main, E. Garcia, and D.V. Newton Precision position control of piezoelectric actuators using charge feedback J Guid Control Dyn 18 5 1995 1068 1073
    • (1995) J Guid Control Dyn , vol.18 , Issue.5 , pp. 1068-1073
    • Main, J.A.1    Garcia, E.2    Newton, D.V.3
  • 36
    • 53249121913 scopus 로고    scopus 로고
    • Charge drives for scanning probe microscope positioning stages
    • A.J. Fleming, and K.K. Leang Charge drives for scanning probe microscope positioning stages Ultramicroscopy 2008
    • (2008) Ultramicroscopy
    • Fleming, A.J.1    Leang, K.K.2
  • 37
    • 22944475297 scopus 로고    scopus 로고
    • A grounded-load charge amplifier for reducing hysteresis in piezoelectric tube scanner
    • A.J. Fleming, and S.O.R. Moheimani A grounded-load charge amplifier for reducing hysteresis in piezoelectric tube scanner Rev Sci Instrum 76 2005
    • (2005) Rev Sci Instrum , vol.76
    • Fleming, A.J.1    Moheimani, S.O.R.2
  • 38
  • 40
    • 0031104263 scopus 로고    scopus 로고
    • Design impact of piezoelectric actuator nonlinearities
    • J.A. Main, and E. Garcia Design impact of piezoelectric actuator nonlinearities AIAA J Guid Control Dyn 20 2 1997 327 332
    • (1997) AIAA J Guid Control Dyn , vol.20 , Issue.2 , pp. 327-332
    • Main, J.A.1    Garcia, E.2
  • 41
    • 0024011274 scopus 로고
    • A Simple way to reduce hysteresis and creep when using piezoelectric actuator
    • H. Kaizuka, and B. Siu A Simple way to reduce hysteresis and creep when using piezoelectric actuator Jpn J Appl Phys 27 5 1988 L773 L776
    • (1988) Jpn J Appl Phys , vol.27 , Issue.5
    • Kaizuka, H.1    Siu, B.2
  • 43
    • 0029342693 scopus 로고
    • Modeling hysteresis in piezoceramic actuators
    • P. Ge, and M. Jouaneh Modeling hysteresis in piezoceramic actuators Prec Eng 17 1995 211 221
    • (1995) Prec Eng , vol.17 , pp. 211-221
    • Ge, P.1    Jouaneh, M.2
  • 44
    • 0344119484 scopus 로고    scopus 로고
    • Robust tracking control of a piezoactuator using a new approximate hysteresis model
    • M.-S. Tsai, and J.-S. Chen Robust tracking control of a piezoactuator using a new approximate hysteresis model J Dyn Syst Meas Control 125 2003 96 102
    • (2003) J Dyn Syst Meas Control , vol.125 , pp. 96-102
    • Tsai, M.-S.1    Chen, J.-S.2
  • 45
    • 33745441919 scopus 로고    scopus 로고
    • Precise positioning of piezo-actuated stages using hysteresis-observer based control
    • C.-J. Lin, and S.-R. Yang Precise positioning of piezo-actuated stages using hysteresis-observer based control Mechatronics 16 2006 417 426
    • (2006) Mechatronics , vol.16 , pp. 417-426
    • Lin, C.-J.1    Yang, S.-R.2
  • 47
    • 38049002588 scopus 로고    scopus 로고
    • Tracking control of the z-tilts error compensation stage of the nano-measuring machine using capacitor insertion method
    • V.-T. Liu, C.-H. Li, T.-Y. Chen, C.-L. Lin, and Y.-C. Lin Tracking control of the z-tilts error compensation stage of the nano-measuring machine using capacitor insertion method Proc. ICIC 2007, LNCS 4681 2007 616 625
    • (2007) Proc. ICIC 2007, LNCS 4681 , pp. 616-625
    • Liu, V.-T.1    Li, C.-H.2    Chen, T.-Y.3    Lin, C.-L.4    Lin, Y.-C.5
  • 48
    • 0009990394 scopus 로고
    • Application of capacitor insertion method to scanning tunneling microscopes
    • H. Kaizuka, and B. Siu Application of capacitor insertion method to scanning tunneling microscopes Rev Sci Instrum 60 10 1989 3119 3122
    • (1989) Rev Sci Instrum , vol.60 , Issue.10 , pp. 3119-3122
    • Kaizuka, H.1    Siu, B.2


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