Nonlinear optimal tracking control of a piezoelectric nanopositioning stage

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6166, Issue , 2006, Pages

  Oates, William S ^a   Smith, Ralph C ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Hysteresis; Nanopositioning; Nonlinear control; Optimal control; Piezoelectric

Indexed keywords

NANOPOSITIONING; NONLINEAR CONTROL; PIEZOELECTRIC CONSTITUTIVE LAW; THERMAL-RELAXATION;

ATOMIC FORCE MICROSCOPY; HYSTERESIS; LITHOGRAPHY; OPTIMAL CONTROL SYSTEMS; POSITION CONTROL; TRACKING (POSITION);

PIEZOELECTRIC MATERIALS;

EID: 33745854273     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.658147     Document Type: Conference Paper

References (25)

1. Ascher, U., Mattheij, R., and Russell, R., 1995. Numerical Solution of Boundary Value Problems for Ordinary Differential Equations. SIAM Classics in Applied Mathematics.
2. Bryson, A., and Ho, Y.-C., 1969. Applied Optimal Control. Blasidell Publishing Company, Waltham, MA.
3. Croft, D., and Devasia, S., 1999. "Vibration compensation for high speed scanning tunneling microscopy". Rev. Sci. Instrum., 70(12), pp. 4600-4605.
4. Dapino, M., Smith, R., and Flatau, A., 2000. "A structural strain model for magnetostrictive transducers". IEEE T. Magn., 36(3), pp. 545-556.
5. 3/GaN heterostructures by scanning probe microscopy". Appl. Phys. Lett, 84(25), pp. 5153-5155.
6. Lewis, F., and Syrmos, V., 1995. Optimal Control. John Wiley and Sons, New York, NY.
7. Main, J., Garcia, E., and Newton, D., 1995. "Precision position control of piezoelectric actuators using charge feedback". J. Guid. Control Dynam., 18(5), pp. 1068-1073.
8. Main, J., Garcia, E., Newton, D., Massengil, L., and Garcia, E., 1996. "Efficient power amplifiers for piezoelectric applications". Smart Mater Struct, 5(6), pp. 766-775.
9. Oates, W., and Smith, R. "Nonlinear control design for a piezoelectric-driven nanopositioning stage". J. Dyn. Syst.-T. ASME, (CRSC technical report CRSC-TR05-43), submitted.
10. Oates, W., and Smith, R. "Nonlinear optimal control techniques for vibration attenuation using nonlinear magnetostricive actuators". J. Intell. Mater. Sys. Struct. (CRSC technical report CRSC-TR05-25), submitted.
11. Oates, W., and Smith, R. "Optimal tracking using magnetostricive actuators operating in the nonlinear and hysteretic regime". J. Dyn. Syst.-T. ASME, CRSC technical report CRSC-TR05-36, submitted.
12. Salapaka, S., Sebastian, A., Cleveland, J., and Salapaka, M., 2002. "High bandwidth nano-positioner: A robust control approach". Rev. Sci. Instrum., 73(9), pp. 3232-3241.
13. Schitter, G., Menold, P., Knapp, H., Allgower, F., and Stemmer, A., 2003. "High performance feedback for fast scanning atomic force microscopes". Rev. Sci. Instrum., 72(8), pp. 3320-3327.
14. ∞, loop shaping design for nano-positioning". IEEE Proc. Amer. Control Conf., pp. 3708-3713.
15. Smith, R., 1995. "A nonlinear optimal control method for magnetostrictive actuators". J. Intell. Mater. Syst. Struct, 9(6), pp. 468-486.
16. Smith, R., 2005. Smart Material Systems: Model Development. SIAM, Philadelphia, PA.
17. Smith, R., Hatch, A., De, T., Salapaka, M., del Rosario, R., and Raye, J. "Model development for atomic force microscope mechanisms". CRSC-TR05-25, SIAM J. Appl. Math, submitted.
18. Smith, R., Hatch, A., Mukherjee, B., and Liu, S., 2005. "A homogenized energy model for hysteresis in ferroelectric materials: General density formulations". J. Intell. Mater. Syst. Struct, 16(9), pp. 713-732.
19. Smith, R., Salapaka, M., Hatch, A., Smith, J., and De, T., 2002. "Model development and inverse compensator design for high speed nanopositioning". Proc. 41nd IEEE Conf. Decision Control, pp. 3652-3657.
20. Smith, R., Seelecke, S., Dapino, M., and Ounaies, Z., 2005. "A unified framework for modeling hysteresis in ferroic materials". J. Mech. Phys. Solids, 54(1), pp. 46-55.
21. Smith, R., Seelecke, S., Ounaies, Z., and Smith, J., 2003. "A free energy model for hysteresis in ferroelectric materials". J. Intell. Mater. Syst. Struct., 14(11), pp. 719-739.
22. Sugimoto, Y., Abe, M., Hirayama, S., Oyabu, N., Custance, O., and Morita, S., 2005. "Atom inlays performed at room temperature using atomic force microscopy". Nat. Mater., 4, pp. 156-159.
23. Tang, Q., Zhang, Y., Chen, L., Yan, F., and Wong, R., 2005. "Protein delivery with nanoscale precision". Nanotechnology, 16, pp. 1062-1068.
24. Wong, C., Jeon, Y., Barbastathis, G., and Kim, S.-K., 2004. "Analog piezoelectric-driven tunable gratings with nanometer resolution". J. Microelectromech. S., 13(6), pp. 998-1005.
25. Zou, Q., and Devasia, S., 2004. "Preview-based optimal inversion for output tracking: Applications to scanning tunneling microscopy", IEEE T. Contr. Syst. T., 12(3), pp. 375-386.