Tracking control of the Z-tilts error compensation stage of the nano-measuring machine using capacitor insertion method

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 4681 LNCS, Issue , 2007, Pages 616-625

  Liu, Van Tsai ^a   Liu, Chien Hung ^a   Chen, Tsai Yuan ^a   Lin, Chun Liang ^b   Lin, Yu Chen ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Capacitor insertion; Laser measuring systems; Nano measuring machine; Piezoelectric actuator; Z tilts

Indexed keywords

DEFORMATION; ERROR COMPENSATION; INSERTION LOSSES; INTERFEROMETERS; TRACKING (POSITION);

CAPACITOR INSERTION; LASER-MEASURING SYSTEMS; NANO-MEASURING MACHINE; Z-TILTS;

PIEZOELECTRIC ACTUATORS;

EID: 38049002588     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/978-3-540-74171-8_61     Document Type: Conference Paper

References (8)

1. Reinder, B., Koning, W.L.D., Adriaens, H.J.M.T.A., Richard, K.K.: State-Space Analysis and Identification for a Class of Hysteretic Systems. Automatica, 37 (2001) 1883-1892
2. Su, C.Y., Wang, Q., Chen, X., Rakheja, S.: Backstepping Based Variable Structure Control of a Class of Nonlinear Systems. Preceded By Hysteresis: Int. conf. Control and Automatic Budapest, Hungary, (2005) 288-292
3. Ge, P., Jouaneh, M.: Tracking Control of a Piezoceramic Actuator. IEEE Trans. Control Syst. Technolgy, 4(3) (1996) 209-216
4. Goldfard, M., Celanovic, N.: A Lumped Parameter Electromechanical Model for Describing the Nonlinear Behavior of Piezoelectric Actuators. ASME J. Dyn. Syst., Meas. Control, 1(119) (1997) 478-485
5. Tsai, S., Chen, J.S.: Robust Tracking Control of a Piezoactuator Using a New Approximate Hysteresis Model. ASME J. Dyn. Syst., Meas. Contol, 125 (2003) 96-102
6. Dupre, L., Keer, R.V., Melkebeek, J.A.A.: Identification of The Relation Between The Material Parameters In The Presach Model and In The Jiles-Atherton Hysteresis Model. J. Appl. Phys, 85 (1999) 4376-4378
7. Adriaens, H.J.M.T.A., Koning, W.L.D., Banning, R.: Modeling Piezoelectric Actuators. IEEE/ASME Trans. Mechatronics, 5(4) (2000) 331-341
8. Yu, Y., Naganathan, N., Dukkipati, R.: Preisach Modeling of Hysteresis for Piezoceramic Actuators System. Mechanism & Machine Theory, 37 (2002) 49-59