High-contrast grating VCSELs

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 15, Issue 3, 2009, Pages 869-878

  Chang Hasnain, Connie J ^a   Zhou, Ye ^a   Huang, Michael C Y ^a   Chase, Christopher ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

High contrast subwavelength grating; Optical communication; Optical MEMS; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

CRITICAL DIMENSION; EMISSION WAVELENGTH; FABRICATION TOLERANCES; HIGH CONTRAST; HIGH INDEX CONTRAST; HIGH-CONTRAST SUBWAVELENGTH GRATING; LARGE APERTURE; OPTICAL MEMS; POLARIZATION CONTROL; SINGLE LAYER; SINGLE TRANSVERSE MODES; SUB-WAVE LENGTH GRATING; TUNABLE MIRRORS; TUNING SPEED; VERTICAL-CAVITY SURFACE EMITTING LASER; VERTICAL-CAVITY SURFACE-EMITTING LASER (VCSEL); WAVELENGTH REGIMES; WIDE SPECTRUM;

FABRICATION; LASERS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL BEAM SPLITTERS; OPTICAL COMMUNICATION; OPTICAL WAVEGUIDES; OPTOELECTRONIC DEVICES; PHOTONICS;

SURFACE EMITTING LASERS;

EID: 67651002870     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2015195     Document Type: Article

References (29)

1. K. Iga, "Surface-emitting laser-its birth and generation of new optoelectronics field," IEEE J. Sel. Topics Quantum Electron., vol. 6, no. 6, pp. 1201-1215, Nov./Dec. 2000.
2. C. Wilmsem, H. Temkin, and L. A. Coldren, Vertical-Cavity Surface-Emitting Lasers. New York: Cambridge Univ. Press, 1999.
3. J. Cheng and N. K. Dutta, Vertical-Cavity Surface-Emitting Lasers: Technology and Applications. Amsterdam, The Netherlands: Gordon and Breach, 2000.
4. C. J. Chang-Hasnain, "VCSEL for metro communications," in Optical Fiber Communications, IV A, Components, I. Kaminow and T. Li, Eds. New York: Academic, 2002, pp. 666-698.
5. A. Karim, S. Bjorlin, J. Piprek, and J. E. Bowers, "Long-wavelength vertical-cavity lasers and amplifiers," IEEE J. Sel. Topics Quantum Electron., vol. 6, no. 6, pp. 1244-1253, Nov./Dec. 2000.
6. N. Nishiyama, C. Caneau, B. Hall, G. Guryanov, M. H. Hu, X. S. Liu, M.-J. Li, R. Bhat, and C. E. Zah, "Long-wavelength vertical-cavity surface-emitting lasers on InP with lattice matched AlGaInAs-InP DBR grown by MOCVD," IEEE J. Sel. Topics Quantum Electron., vol. 11, no. 5, pp. 990-998, Sep./Oct. 2005.
7. C. F. R. Mateus, M. C. Y. Huang, D. Yunfei, A. R. Neureuther, and C. J. Chang-Hasnain, "Ultrabroadband mirror using low-index cladded subwavelength grating," IEEE Photon. Technol. Lett., vol. 16, no. 2, pp. 518-520, Feb. 2004.
8. C. F. R. Mateus, M. C. Y. Huang, C. Lu, C. J. Chang-Hasnain, and Y. Suzuki, "Broad-band mirror (1.12-1.62 μm) using a subwavelength grating," IEEE Photon. Technol. Lett., vol. 16, no. 7, pp. 1676-1678, Jul. 2004.
9. Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, "Novel surface emitting laser using high-contrast subwavelength grating," presented at the 20th Int. Semicond. Laser Conf., Hawaii, Sep. 2006.
10. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, "NEMS tunable VCSEL," presented at the 20th Int. Semicond. Laser Conf., Hawaii, Sep. 2006.
11. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, "A surface-emitting laser incorporating a high-index-contrast subwavelength grating," Nature Photon., vol. 1, pp. 119-122, 2007.
12. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, "Nano electromechanical optoelectronic tunable VCSEL," Opt. Exp., vol. 15, pp. 1222- 1227, 2007.
13. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, "A nanoelectrome-chanical tunable laser," Nature Photon., vol. 2, pp. 180-184, 2008.
14. Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, "Large fabrication tolerance for VCSELs using high-contrast grating," IEEE Photon. Technol. Lett., vol. 20, no. 6, pp. 434-436, Mar. 2008.
15. Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, "Tunable VCSEL with ultra-thin high contrast grating for high-speed tuning," Opt. Exp., vol. 16, pp. 14221-14226, 2008.
16. M. C. Y. Huang, Y. Zhou, and C. J. Chang-Hasnain, "Single mode high-contrast subwavelength grating vertical cavity," Appl. Phys. Lett., vol. 92, pp. 171108-1-171108-3, 2008.
17. C. Chase, Y. Zhou, M. C. Y. Huang, and C. J. Chang-Hasnain, "NEMO tunable VCSEL using ultra compact high contrast grating for high speed tuning," presented at the 21st Int. Semicond. Laser Conf., Italy, Sep. 2008.
18. Y. Zhou, M. Moewe, J. Kern, M. C. Y. Huang, and C. J. Chang-Hasnain, "Surface-normal emission of a high-Q resonator using a subwavelength high-contrast grating," Opt. Exp., vol. 16, pp. 17282-17287, 2008.
19. Y. Zhou, V. Karagodsky, B. Pesala, F. G. Sedgwick, and C. J. Chang-Hasnain, "A novel ultra-low loss hollow-core waveguide using subwave-length high-contrast gratings," Opt. Exp., vol. 17, pp. 1508-1517, 2009.
20. M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis of planar-grating diffraction," J. Opt. Soc. Amer., vol. 71, pp. 811-818, 1981.
21. C. J. Chang-Hasnain, J. P. Harbison, G. Hasnain, A. C. Von Lehmen, L. T. Florez, and N. G. Stoffel, "Dynamic, polarization, and transverse mode characteristics of vertical cavity surface emitting lasers," IEEE J. Sel. Top. Quantum Electron., vol. 27, no. 6, pp. 1402-1409, Jun. 1991.
22. K. D. Choquette, K. M. Geib, C. I. H. Ashby, R. D. Twesten, O. Blum, H. Q. Hou, D. M. Follstaedt, B. E. Hammons, D. Mathes, and R. Hull, "Advances in selective wet oxidation of AlGaAs alloys," IEEE J. Sel. Top. Quantum Electron., vol. 3, no. 3, pp. 916-926, Jun. 1997.
23. Y. A. Wu, G. S. Li, W. Yuen, C. J. Chang-Hasnain, and C. Caneau, "High-yield processing and single-mode operation of passive antiguide region vertical-cavity," IEEE J. Sel. Top. Quantum Electron., vol. 3, no. 2, pp. 429-434, Apr. 1997.
24. A. Haglund, J. S. Gustavsson, J. Vukusic, P. Modh, and A. Larsson, "Single fundamental-mode output power exceeding 6 mW from VCSELs with a shallow surface relief," IEEE Photon. Technol. Lett., vol. 16, no. 2, pp. 368-370, Feb. 2004.
25. A. J. Danner, J. J. Raftery Jr., N. Yokouchi, and K. D. Choquette, "Transverse modes of photonic crystal vertical-cavity lasers," Appl. Phys. Lett., vol. 84, pp. 1031-1033, 2004.
26. C. J. Chang-Hasnain, "Tunable VCSEL," IEEE J. Sel. Topics Quantum Electron, vol. 6, no. 6, pp. 978-987, Nov./Dec. 2000.
27. S. Decai, W. Fan, P. Kner, J. Boucart, T. Kageyama, Z. Dongxu, R. Pathak, R. F. Nabiev, and W. Yuen, "Long wavelength-tunable VCSELs with optimized MEMS bridge tuning structure," IEEE Photon. Technol. Lett., vol. 16, no. 3, pp. 714-716, Mar. 2004.
28. F. Riemenschneider, M. Maute, H. Halbritter, G. Boehm, M. C. Amann, and P. Meissner, "Continuously tunable long-wavelength MEMS-VCSEL with over 40-nm tuning range," IEEE Photon. Technol. Lett., vol. 16, no. 10, pp. 2212-2214, Oct. 2004.
29. M. C. Y. Huang, K. B. Cheng, Y. Zhou, B. Pesala, C. J. Chang-Hasnain, and A. P. Pisano, "Demonstration of piezoelectric actuated GaAs-based MEMS tunable VCSEL," IEEE Photon. Technol. Lett., vol. 18, no. 10, pp. 1197-1199, May 2006.