3D force components measurement in AFM scratching tests

Ultramicroscopy

Volumn 105, Issue 1-4, 2005, Pages 62-71

  Yan, Y D ^a   Dong, S ^a   Sun, T ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

AFM; Calibration of AFM; Cantilever; Force measurement; Nano machining

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; MICROMACHINING; NANOSTRUCTURED MATERIALS; OPTICAL SYSTEMS; TRIBOLOGY;

CALIBRATION OF AFM; CANTILEVER; NANO MACHINING; SCRATCHING;

FORCE MEASUREMENT;

DIAMOND;

ACCURACY; ATOMIC FORCE MICROSCOPY; CALIBRATION; CONFERENCE PAPER; EXPERIMENTAL TEST; FORCE; FRICTION; MACHINE; MEASUREMENT; THREE DIMENSIONAL IMAGING;

EID: 27544508866     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2005.06.019     Document Type: Conference Paper

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