Focused ion-beam based nanohole modeling, simulation, fabrication, and application

Journal of Manufacturing Science and Engineering

Volumn 132, Issue 1, 2010, Pages 0110051-0110058

  Zhou, Jack ^a   Yang, Guoliang ^b  

^a Drexel University   (United States)

^b DREXEL UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROCHEMICAL ETCHING; FILM PREPARATION; FILM THICKNESS; FOCUSED ION BEAMS; IONS; MACHINING; THIN FILMS;

EPITAXIAL DEPOSITION; FOCUSED ION BEAM MACHINING; FREE-STANDING THIN FILMS; HOLE FABRICATION; INDUCED DEPOSITION; ION BEAM INDUCED DEPOSITION; NANO-METER SCALE; SOLID STATE THIN FILMS;

FABRICATION;

EID: 77955325031     PISSN: 10871357     EISSN: 15288935     Source Type: Journal    
DOI: 10.1115/1.4000617     Document Type: Article

References (44)

1. Marziali, A., and Akeson, M., 2001, "New DNA Sequencing Methods," Annu. Rev. Biomed. Eng., 3, pp. 195-223.
2. Sauer-Budge, A. F., Nyamwanda, J. A., Lubensky, D. K., and Branton, D., 2003, "Unzipping Kinetics of Double-Stranded DNA in a Nanopore," Phys. Rev. Lett., 90, pp. 238101.
3. Li, J., Stein, D., McMullan, C., Branton, D., Aziz, M. J., and Golovchenko, J. A., 2001, "Ion-Beam Sculpting at Nanometer Length Scales," Nature (London), 412, pp. 166-169.
4. Chen, P., Mitsui, T., Farmer, D. B., Golovchenko, J., Gordon, R. G., and Branton, D., 2004, "Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores," Nano Lett., 4, pp. 1333-1337.
5. Storm, A. J., Chen, J. H., Ling, X. S., Zandbergen, H. W., and Dekker, C., 2003, "Fabrication of Solid-State Nanopores With Single-Nanometre Precision," Nature Mater., 2, pp. 537-540.
6. Bustamante, J. O., Hanover, J. A., and Liepins, A., 1995, "The Ion-Channel Behavior of the Nuclear-Pore Complex," J. Membr. Biol., 146, pp. 239-251.
7. Dreiselkelmann, B., 1994, "Translocation of DNA Across Bacterial-Membranes," Microbiol. Rev., 58, pp. 293-316.
8. Luo, D., and Saltzman, W. M., 2000, "Synthetic DNA Delivery Systems," Nat. Biotechnol., 18, pp. 33-37.
9. Felgner, P. L., 1998, "DNA Vaccines," Curr. Biol., 8, pp. R551-R553.
10. Slonkina, E., and Kolomeisky, A. B., 2003, "Polymer Translocation Through a Long Nanopore," J. Chem. Phys., 118, pp. 7112-7117.
11. Deamer, D. W., and Branton, D., 2002, "Characterizing of Nucleic Acids by Nanopore Analysis," Acc. Chem. Res., 35, pp. 817-825.
12. Li, J., Gershow, M., Stein, D., Brandin, E., and Golovchenko, J. A., 2003, "DNA Molecules and Configurations in a Solid-State Nanopore Microscope," Nature Mater., 2, pp. 611-615.
13. Akeson, M., Branton, D., Kasianowicz, J. J., Brandin, E., and Deamer, D. W., 1999, "Microsecond Time-Scale Discrimination Among Polycytidylic Acid, Polyadenylic Acid, and Polyuridylic Acid as Homopolymers or as Segments Within Single RNA Molecules," Biophys. J., 77, pp. 3227-3233.
14. Chen, W., and Ahmed, H., 1993, "Fabrication of 5-7 nm Wide Etched Lines in Silicon Using 100 keV Electron-Beam Lithography and Polymethylmethacrylate Resist," Appl. Phys. Lett., 62, pp. 1499-1501.
15. 15) Chen, C.-M., and Peng, E.-H., 2003, "Nanopore Sequencing of Polynucleotides Assisted by a Rotating Electric Field," Appl. Phys. Lett., 82, pp. 1308-1310.
16. Bayley, H., and Cremer, P. H., 2001, "Stochastic Sensors Inspired by Biology," Nature (London), 413, pp. 226-230.
17. Kasianowicz, J. J., Herickson, S. E., Weetall, H. H., and Robertson, B., 2001, "Simultaneous Multianalyte Detection With a Nanometer-Scale Pore," Anal. Chem., 73, pp. 2268-2272.
18. Howorka, S., Cheley, S., and Bayley, H., 2001, "Sequence Specific Detection of Individual DNA Strands Using Engineered Nanopores," Nat. Biotechnol., 19, pp. 636-639.
19. Desai, T. A., Chu, W. H., Tu, J. K., Beattie, G. M., Hayek, A., and Ferrari, M.,1998, "Microfabricated Immunoisolating Biocapsules," Biotechnol. Bioeng., 57, pp. 118-120.
20. Pores Help Nanogate Deliver, medical materials update, http://www.buscom.com/letters/mmupromo/mmu/mmu.html.
21. Burnouf, T., and Radosevich, M., 2003, "Nanofiltration of Plasma-Derived Biopharmaceutical Products," Haemophilia, 9, pp. 24-37.
22. Kasianowicz, J. J., Brandin, E., Branton, D., and Deamer, D. W., 1996, "Characterization of Individual Polynucleotide Molecules Using a Membrane Channel," Proc. Natl. Acad. Sci. U.S.A., 93, pp. 13770-13773.
23. Meller, A., Nivon, L., and Branton, D., 2001, "Voltage-Driven DNA Translocations Through a Nanopore," Phys. Rev. Lett., 86, pp. 3435-3438.
24. Henrickson, S. E., Misakian, M., Robertson, B., and Kasianowicz, J. J., 2000 "Driven DNA Transport Into an Asymmetric Nanometer-Scale Pore," Phys. Rev. Lett., 85, pp. 3057-3060.
25. Yong, C., and Pepin, A., 2001, "Nanofabrication: Conventional and Nonconventional Methods," Electrophoresis, 22, pp. 187-207.
26. Smith, H. I., and Craighead, H. G., 1990, "Nanofabrication," Phys. Today, 43(2), pp. 24-30.
27. Sze, S. M., 1985, Semiconductor Devices: Physics and Technology, Wiley, New York.
28. Tseng, A., 2004, "Recent Developments in Micromilling Using Focused Ion Beam Technology," J. Micromech. Microeng., 14, pp. R15-R34.
29. Puers, R., and Reyntjens, S., 2000, "Fabrication of Three-Dimensional Microstructures by Focused Ion Beam Direct-Write CVD and Their Application to Hermetic Encapsulations, Proceedings of the SeSens 2000, Veldhoven, The Netherlands, pp. 677-681.
30. Dubner, A. D., 1991, "The Role of the Ion-Solid Interaction in Ion-Beam-Induced Deposition of Gold," J. Appl. Phys., 70, pp. 665-673.
31. Ralls, K. S., Buhrman, R. A., and Tiberio, R. C., 1989, "Fabrication of Thin-Film Metal Nanobridges," Appl. Phys. Lett., 55, pp. 2459-2461.
32. Apel, P. Y., Korchev, Y. E., Siwy, Z., Spohr, R., and Yoshida, M., 2001, "Diode-Like Single-Ion Track Membrane Prepared by Electro-Stopping," Nucl. Instrum. Methods Phys. Res. B, 184, pp. 337-346.
33. Siwy, Z., and Fulinski, A., 2002, "Fabrication of a Synthetic Nanopore Ion Pump," Phys. Rev. Lett., 89, 198103.
34. Stein, D. M., McMullan, C. J., Li, J., and Golovchenko, J. A., 2004, "Feedback-Controlled Ion Beam Sculpting Apparatus," Rev. Sci. Instrum., 75, pp. 900-905.
35. Polk, B., Bernard, M., Kasianowicz, J. J., Misakian, M., and Gaitan, M., 2004, "Microelectroplating Silver on harp Edges Toward the Fabrication of Solid-State Nanopores," J. Electrochem. Soc., 151, pp. C559-C566.
36. Heng, J. B., Ho, C., Kim, T., Timp, R., Aksimentiev, A., Grinkova, Y. V., Sligar, S., Schulten, K., and Timp, G., 2004, "Sizing DNA Using a Nanometer-Diameter Pore," Biophys. J., 87, pp. 2905-2911.
37. Chen, P., Gu, J., Brandin, E., Kim, Y. R., Wang, Q., and Branton, D., 2004, "Probing Single DNA Molecule Transport Using Fabricated Nanopores," Nano Lett., 4, pp. 2293-2298.
38. Pronko, P. P., Dutta, S. K., Squier, J., Rudd, J. V., Du, D., and Mourou, G., 1995, "Machining of Sub-Micron Holes Using a Femtosecond Laser at 800 nm," Opt. Commun., 114, pp. 106-110.
39. Itoh, F., Shimase, A., and Haraichi, S., 1990, "Two-Dimensional Profile Simulation of Focused Ion-Beam Milling of LSI," J. Electrochem. Soc., 137, pp. 983-988.
40. Biersack, J. P., and Haggmark, L. G., 1980, "A Monte Carlo Computer Program for the Transport of Energetic Ions in Amorphous Targets," Nucl. Instrum. Methods, 174, pp. 257-269.
41. Reyntjens, S., and Puers, R., 2000, "Focused Ion Beam Induced Deposition: Fabrication of Three-Dimensional Microstructures and Young's Modulus of the Deposited Material," J. Micromech. Microeng., 10, pp. 181-188.
42. Edinger, K., and Edinger, Th., 2000, "Modeling of Focused Ion Beam Induced Surface Chemistry," J. Vac. Sci. Technol. B, 18, pp. 3190-3193.
43. Maluf, M., and Williams, K., 2004, An Introduction to Microelectromechanical System Engineering, 2nd ed., Artech House, Boston, MA.
44. Vercoutere, W., Winters-Hilt, S., Olsen, H., Deamer, D. W., Haussler, D., and Akeson, M., 2001, "Rapid Discrimination Among Individual DNA Molecules at Single Nucleotide Resolution Using a Nanopore Instrument," Nat. Biotechnol.,19, pp. 248-252.