X-Y-θ nano-positioning table system for a mother machine

CIRP Annals - Manufacturing Technology

Volumn 53, Issue 1, 2004, Pages 337-340

  Shinno, H ^a   Hashizume, H ^a   Yoshioka, H ^a   Komatsu, K ^a   Shinshi, T ^a   Sato, K ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Nano positioning; Table system; Ultra precision machine tool

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); MACHINING; MOTORS; NANOTECHNOLOGY; POROUS MATERIALS; STIFFNESS;

NANO-POSITIONING; TABLE SYSTEM; ULTRA-PRECISION MACHINE TOOL;

MACHINE TOOLS;

EID: 3142772744     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60711-2     Document Type: Article

References (8)

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