High speed nanometer positioning using a hybrid linear motor

CIRP Annals - Manufacturing Technology

Volumn 50, Issue 1, 2001, Pages 243-246

  Shinno, H ^a   Hashizume, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Nano positioning; Nano technology; Ultra precision machine

Indexed keywords

ACTUATORS; ERRORS; LINEAR MOTORS; MACHINE TOOLS; PIEZOELECTRIC DEVICES;

HYBRID LINEAR MOTORS; NANO-POSITIONING;

NANOTECHNOLOGY;

EID: 0034959603     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62114-3     Document Type: Article

References (6)

1. Development of high speed nanometer positioning table system and its performances evaluation
2. Nanometer positioning of a linear motor-driven ultraprecision aerostatic table system with electrorheological fluid dampers
3. Linear motor-levitated stage for photolithography
4. Magnetic bearing stage for photolithography
5. Accurate tracking control of linear synchronous motor machine tool axes
6. High-response X-Y stage system driven by in-parallel linear motors