Dynamic analysis of an electrostatic compressor

International Journal of Refrigeration

Volumn 33, Issue 5, 2010, Pages 889-896

  Sathe, Abhijit A ^a   Groll, Eckhard A ^a   Garimella, Suresh V ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Diaphragm compressor; Mechanical property; Modelling; Refrigeration; Simulation

Indexed keywords

ANALYTICAL APPROACH; ANALYTICAL DYNAMICS; ANALYTICAL MODEL; DYNAMIC EFFECTS; DYNAMIC FORCES; ELECTRONICS COOLING; EXPERIMENTAL MEASUREMENTS; FINITE TIME; MODELLING; NEW MODEL; NUMERICAL SIMULATION; OPERATING VOLTAGE; PUMPING FREQUENCY; QUASI-STATIC MODEL; TRANSIENT DYNAMICS;

CAPILLARY TUBES; COMPRESSORS; DIAPHRAGMS; DYNAMIC ANALYSIS; DYNAMICS; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; PUMPS; REFRIGERATION;

COMPUTER SIMULATION;

EID: 77955230883     PISSN: 01407007     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijrefrig.2010.04.004     Document Type: Article

References (14)

1. M. Athavale, H.Y. Li, H.Q. Yang, A.J. Przekwas, C. Cabuz, and W. Herb Coupled Electrostatics-structures-fluidic Simulations of a Bead Mesopump 1999 IMECE Nashville, TN pp. 459-465
2. M. Bao, and H. Yang Squeeze film air damping in MEMS Sensors and Actuators, A: Physical 136 2007 3 27
3. W.S. Griffin, H.H. Richardson, and S. Yamanami A study of squeeze-film damping ASME Transactions - Journal of Basic Engineering 88 1966 451 456
4. G. Li, and H. Hughes Review of viscous damping in micro-machined structures Proceedings of SPIE - The International Society for Optical Engineering 4176 2000 30 46
5. D. Liu, and S.V. Garimella Investigation of liquid flow in microchannels Journal of Thermophysics and Heat Transfer 18 2004 65 72
6. M.J. Moran, and H.N. Shapiro Fundamentals of Engineering Thermodynamics 2008 John Wiley New York
7. A.H. Nayfeh, and M.I. Younis A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping Journal of Micromechanics and Microengineering 14 2004 170 181
8. A.A. Sathe, E.A. Groll, and S.V. Garimella Analytical model for an electrostatically actuated miniature diaphragm compressor Journal of Micromechanics and Microengineering 18 2008 035010
9. A.A. Sathe, E.A. Groll, and S.V. Garimella Optimization of electrostatically actuated miniature compressors for electronics cooling International Journal of Refrigeration 32 2009 1517 1525
10. S.D. Senturia Microsystem Design 2001 Kluwer Dordrecht
11. S. Trutassanawin, E.A. Groll, S.V. Garimella, and L. Cremaschi Experimental investigation of a miniature-scale refrigeration system for electronics cooling IEEE Transactions on Components and Packaging Technologies 29 2006 678 687
12. T. Veijola, H. Kuisma, and J. Lahdenpera The influence of gas-surface interaction on gas-film damping in a silicon accelerometer Sensors and Actuators A, (Physical) A66 1998 83 92
13. Z. Yang, and X. Li Simulation and optimization on the squeeze-film damping of a novel high-g accelerometer Microelectronics Journal 37 2006 383 387
14. M.I. Younis, and A.H. Nayfeh Simulation of squeeze-film damping of microplates actuated by large electrostatic load Journal of Computational and Nonlinear Dynamics 2 2007 232 241