Simulation and optimization on the squeeze-film damping of a novel high-g accelerometer

Microelectronics Journal

Volumn 37, Issue 5, 2006, Pages 383-387

  Yang, Zunxian ^a   Li, Xinxin ^b  

^a FUZHOU UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Curved overload protection; High g accelerometer; Shock response; Squeeze film damping

Indexed keywords

COMPUTER SIMULATION; DAMPING; FINITE ELEMENT METHOD; OPTIMIZATION; SURFACES; VISCOSITY;

CURVED OVERLOAD PROTECTION; HIGH-G ACCELEROMETER; SHOCK RESPONSE; SQUEEZE-FILM DAMPING;

ACCELEROMETERS;

EID: 33644776607     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.07.005     Document Type: Article

References (8)

1. B. Davies, C. Barron, and S. Montague et.al. High g MEMS integrated accelerometer. Proc. SPIE 3046 1997 52
2. Y. Ning, and Y. Loke McKinnon. Fabrication and characterization of high g-force silicon piezoresistive accelerometers. Sensors and Actuators A 48 1 1995 55 61
3. D.M. Tanner, J.A. Walraven, and K. Helgesen MEMS reliability in shock environments, IEEE International Reliability Physics Symposium, San Joes, USA 2000 2000 129 138
4. N. De Rooij, T. Tschan, and A. Bezinge Oil-damped piezoresistive silicon accelerometers, Solid-State Sensors and Actuators, TRANSDUCERS '91, 1991, June PP 112 1991 114
5. Xin Wang, Judy. M, White. J, Validating fast simulation of air damping in micromachined devices, Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on 20-24 Jan. 2002 PP: 210 - 213.
6. Velten. T, He. C.Y, Obermeie. E, Dynamic behavior of a new two-axis accelerometer, Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago, 1997 PP:1217 - 1220.
7. S. Terry A miniature silicon accelerometer with built-in damping, Solid-State Sensor and Actuator Workshop, June PP 114 1988 116
8. B Minhang Micro mechanical transducers - pressure sensors, accelerators and gyroscopes 2000 Elsevier Publisher Amsterdam p. 39