Characterizing lateral resolution of interferometers: The Height Transfer Function (HTF)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5878, Issue , 2005, Pages 1-12

  Dorband B ^a   Hetzler, J ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

Interferometers; Lateral resolution; Transfer function

Indexed keywords

COMPUTER SIMULATION; FOURIER TRANSFORMS; OPTICAL RESOLVING POWER; PHASE TRANSITIONS; RAY TRACING; TRANSFER FUNCTIONS;

LATERAL RESOLUTION;

INTERFEROMETERS;

EID: 29244433564     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.614311     Document Type: Conference Paper

References (4)

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3. H. Gross, Handbook of Optical Systems, WILEY-VCA Verlag GmbH & Co. KGaA, 2005
4. D. Malacara, Optical Shop Testing, Wiley, New York, 1992