Simple methods for alignment of line distance sensor arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7718, Issue , 2010, Pages

  Bremer, H ^a   Schmahling F ^a   Elster, C ^a   Krey, S ^b   Ruprecht, A ^b   Schulz, M ^a   Stavridis, M ^a   Wiegmann, A ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b Trioptics GmbH   (Germany)

Author keywords

nanometrology; optical distance sensor; sensor array; submicrometer accuracy; topography

Indexed keywords

ACCURATE MEASUREMENT; ARRAY OF SENSORS; DISTANCE SENSORS; ERROR SOURCES; EXPERIMENTAL DATA; LINE SENSOR; LINEAR TRANSLATION; M-ARRAY; MULTI-STEP PROCEDURES; NANOMETROLOGY; OPTICAL DISTANCE; OPTICAL DISTANCE SENSOR; OPTICAL LINES; PARALLEL DATA ACQUISITION; ROTATION ANGLES; SCANNING TECHNIQUES; SENSOR ERRORS; SENSOR ORIENTATION; SIMPLE METHOD; SIMULATED DATA; SINGLE SENSOR; STEP EDGE; SUBMICROMETER ACCURACY; TRANSVERSAL DISPLACEMENT; VIRTUAL EXPERIMENTS;

ALIGNMENT; CAMERAS; SCANNING; SYSTEMATIC ERRORS;

SENSOR ARRAYS;

EID: 77953904057     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.854266     Document Type: Conference Paper

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