Chirp calibration standards for surface measuring instruments;Chirp-Kalibriernormale für Oberflächenmessgeräte

Technisches Messen

Volumn 74, Issue 11, 2007, Pages 572-576

  Krüger Sehm, Rolf ^a   Bakucz, Peter ^a   Jung, Lena ^a   Wilhelms, Harald ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Confocal microscope; Contact stylus instrument; Interference microscope; Measurement standard

Indexed keywords

CALIBRATION STANDARD; CONTACT STYLUS INSTRUMENTS; INTERFERENCE MICROSCOPES; MANUFACTURING PROCESS; MEASUREMENT STANDARDS; MEASURING INSTRUMENTS; MORPHOLOGICAL OPERATIONS; SCALED FREQUENCIES;

CALIBRATION; CONFOCAL MICROSCOPY; MATHEMATICAL MORPHOLOGY; SURFACE MEASUREMENT; TURNING;

MICROSCOPES;

EID: 67649299266     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: 10.1524/teme.2007.74.11.572     Document Type: Article

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