A model based approach to reference-free straightness measurement at the nanometer comparator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7390, Issue , 2009, Pages

  Weichert, C ^a   Stavridisa, M ^a   Walzel, M ^a   Elster, C ^a   Wiegmann, A ^a   Schulz, M ^a   Koning R ^a   Fluggea J ^a   Tutschb, R ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Error separation; Monte Carlo simulation; Straightness measurement; Virtual experiment

Indexed keywords

DYNAMIC MEASUREMENT; ERROR SEPARATION; ERROR SOURCES; HIGH PRECISION; HIGH-PRECISION CALIBRATION; INCREMENTAL ENCODER; LINE SCALE; LINE STRUCTURES; MEASUREMENT POINTS; MEASUREMENT SYSTEM; MEASURING MACHINES; MODEL BASED APPROACH; MONTE CARLO SIMULATION; MULTI SENSOR; ONE DIMENSION; PLANE MIRRORS; POSITIONING DEVICES; RANGE MEASUREMENT SYSTEMS; SENSITIVE PARAMETER; SINGLE PATH; STRAIGHTNESS MEASUREMENT; VIRTUAL EXPERIMENT; VIRTUAL EXPERIMENTS;

COMPARATORS (OPTICAL); COMPUTER SIMULATION; EXPERIMENTS; FUNCTIONAL ELECTRIC STIMULATION; INTERFEROMETERS; INTERFEROMETRY; MIRRORS; MONTE CARLO METHODS;

UNCERTAINTY ANALYSIS;

EID: 69949179663     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.827681     Document Type: Conference Paper

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