The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Macedo, Francisco ^a   Carvalho, Pedro ^a   Cunha, Luís ^a   Vaz, Filipe ^a   Gibkes, Jurgen ^b   Bein, Bruno K ^b   Pelzl, Josef ^b  

^a UNIVERSITY OF MINHO   (Portugal)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Coatings; Dc magnetron sputtering; Modulated ir radiometry; Thermal properties; Zr O N

Indexed keywords

CONTROLLED CONDITIONS; DC MAGNETRON SPUTTERING; EMPIRICAL CORRELATIONS; INTERNAL CHANGES; IR RADIOMETRY; PROCESSING CONDITION; STRUCTURAL CHANGE; STRUCTURAL CHARACTERIZATION; THERMAL PROPERTIES; THERMAL TRANSPORT PARAMETERS; THERMAL TRANSPORT PROPERTIES;

CHARACTERIZATION; RADIOMETERS; RADIOMETRY; THERMODYNAMIC PROPERTIES; THIN FILMS; TRANSPORT PROPERTIES; VAPOR DEPOSITION; ZIRCONIUM;

DIFFUSION COATINGS;

EID: 77954939155     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931802     Document Type: Conference Paper

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