Thickness control of coatings by means of modulated IR radiometry

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Macedo, Francisco ^a   Vaz, Filipe ^a   Fernandes, Ana C ^a   Nzodoum Fotsing, Jean L ^b   Gibkes, Juergen ^b   Pelzl, Josef ^b   Bein, Bruno K ^b  

^a UNIVERSITY OF MINHO   (Portugal)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Coatings; Deposition control; Modulated ir radiometry; Thermal properties; Thickness

Indexed keywords

COATING THICKNESS; COATINGS DEPOSITION; INVERSE SOLUTION; IR RADIOMETRY; MICROSCOPIC MEASUREMENT; NON DESTRUCTIVE; NON-CONTACT; PHASE LAGS; QUANTITATIVE INTERPRETATION; REACTIVE MAGNETRON SPUTTERING; SMOOTH SURFACE; THERMAL PROPERTIES; THERMAL TRANSPORT PROPERTIES; THERMAL WAVE; THERMAL WAVE METHOD; TWO-LAYER THERMAL WAVE PROBLEM;

MEASUREMENT ERRORS; RADIOMETERS; RADIOMETRY; THERMODYNAMIC PROPERTIES; THICKNESS MEASUREMENT; TRANSPORT PROPERTIES;

COATINGS;

EID: 77950839387     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931503     Document Type: Conference Paper

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