Thermal characterization of hard decorative thin films

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Macedo, Francisco ^a   Vaz, Filipe ^a   Fernandes, Ana C ^a   Rebouta, Luís ^a   Carvalho, Sandra ^a   Junge, Klaus H ^b   Bein, Bruno K ^b  

^a UNIVERSITY OF MINHO   (Portugal)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

(TiSi)M; Coatings; DC magnetron sputtering; Deposition conditions; Modulated IR radiometry; Oxygen flow; Surface roughness; Thermal properties; Thin films; TiCxOy

Indexed keywords

(TISI)M; DC MAGNETRON SPUTTERING; DEPOSITION CONDITIONS; MODULATED IR RADIOMETRY; OXYGEN FLOW; THERMAL PROPERTIES; TICXOY;

COATINGS; DEPOSITION; MAGNETRONS; METAL ANALYSIS; MODULATION; OXYGEN; RADIOMETERS; RADIOMETRY; SURFACE CHEMISTRY; SURFACE PROPERTIES; SURFACE ROUGHNESS; TEMPERATURE INDICATING CAMERAS; THIN FILMS; TITANIUM CARBIDE;

THERMODYNAMIC PROPERTIES;

EID: 40949092559     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730609     Document Type: Conference Paper

References (6)

1. F. Macedo, J. Ferreira, F. Vaz, L. Rebouta, A. Haj Daoud, D. Dietzel, B. K. Bein, "Photothermal Characterization of Sputtered Thin Films and Substrate Treatment", in: Photoacoustic & Photothermal Phenomena, F. ScudieriM. Bertolotti, Eds., AIP Conference Proceedings 1999, 463, 536.
2. J. L. Nodoum Fotsing, J. Gibkes, J. Pelzl, B. K. Bein, J. Appl. Phys. 2005, 98, 063522.
3. F. Macedo, A. Gören, A. C. Fernandes, F. Vaz, J. Gibkes, K. H. Junge, J. L. Nzodoum-Fotsing, B. K. Bein, Potential of modulated IR radiometry for the on-line control of coatings, Proceedings PSE 2006.
4. E. Ribeiro, L. Rebouta, S. Carvalho, F. Vaz, G. G. Fuentes, R. Rodriguez, M. Zazpe, E. Alves, Ph. Goudeau, J. P. Rivière, Surf. Coat. Technol. 2004, 188-189, 351.
5. C. A. Bennett, R. R. Patty, Appl. Optics 1982, 21, 49.
6. F. Macedo, F. Vaz, L. Rebouta, P. Carvalho, A. Haj-Daoud, K. H. Junge, J. Pelzl, B. K. Bein, Modulated IR radiometry of (TiSi)N thin films, Proceedings RIVA 2005.