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Volumn 82, Issue 12, 2008, Pages 1457-1460

Modulated IR radiometry of (TiSi)N thin films

Author keywords

Bias voltage; Coatings; IR radiometry; Photothermal; Sputtering; Surface roughness; Thermal properties; Ti Si N

Indexed keywords

CORRELATION METHODS; FRICTION; RADIOMETERS; RADIOMETRY; REACTIVE SPUTTERING; SPUTTER DEPOSITION; SURFACE CHEMISTRY; SURFACE PROPERTIES; SURFACE ROUGHNESS; THERMODYNAMIC PROPERTIES; THICK FILMS; THIN FILMS; TITANIUM COMPOUNDS; TRANSPORT PROPERTIES;

EID: 49149127149     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.03.066     Document Type: Article
Times cited : (17)

References (8)
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    • Macedo F, Ferreira J, Vaz F, Rebouta L, Haj Daoud A, Dietzel D, et al. Photothermal characterization of sputtered thin films and substrate treatment, In: Scudieri F, Bertolotti M (Ed.), Photoacoustic and photothermal phenomena. AIP conference proceedings; 1999, vol. 463. p. 536-8.
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    • Bein B.K., and Pelzl J. Analysis of surfaces exposed to plasmas by nondestructive photoacoustic and photothermal techniques. In: Auciello O., and Flamm D.L. (Eds). Plasma diagnostics, vol. 2. Surface analysis and interactions (1989), Academic Press 211-236
    • (1989) Plasma diagnostics, vol. 2. Surface analysis and interactions , pp. 211-236
    • Bein, B.K.1    Pelzl, J.2
  • 5
    • 0036496671 scopus 로고    scopus 로고
    • Effects of ion bombardment on properties of d.c. sputtered superhard (Ti, Si, Al)N nanocomposite coatings
    • Ribeiro E., Malczyk A., Carvalho S., Rebouta L., Fernandes J.V., Alves E., et al. Effects of ion bombardment on properties of d.c. sputtered superhard (Ti, Si, Al)N nanocomposite coatings. Surf Coat Technol 151-152 (2002) 515
    • (2002) Surf Coat Technol , vol.151-152 , pp. 515
    • Ribeiro, E.1    Malczyk, A.2    Carvalho, S.3    Rebouta, L.4    Fernandes, J.V.5    Alves, E.6
  • 6
    • 20044390924 scopus 로고    scopus 로고
    • Characterization of hard DC-sputtered Si-based TiN coatings: the effect of composition and ion bombardment
    • Ribeiro E., Rebouta L., Carvalho S., Vaz F., Fuentes G.G., Rodriguez R., et al. Characterization of hard DC-sputtered Si-based TiN coatings: the effect of composition and ion bombardment. Surf Coat Technol 188-189 (2004) 351
    • (2004) Surf Coat Technol , vol.188-189 , pp. 351
    • Ribeiro, E.1    Rebouta, L.2    Carvalho, S.3    Vaz, F.4    Fuentes, G.G.5    Rodriguez, R.6
  • 7
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    • Extremum method - inverse solution of the two-layer thermal wave problem
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    • Nodoum Fotsing J.L., Gibkes J., Pelzl J., and Bein B.K. Extremum method - inverse solution of the two-layer thermal wave problem. J Appl Phys 98 (2005) 063522-1--17
    • (2005) J Appl Phys , vol.98
    • Nodoum Fotsing, J.L.1    Gibkes, J.2    Pelzl, J.3    Bein, B.K.4
  • 8
    • 4243179058 scopus 로고    scopus 로고
    • Nzodoum Fotsing JL, Bein BK, Pelzl J. Potentialities of photothermal displacement experiments in micro-scaled systems. Proceedings of the Microscale Heat Transfer, Eurotherm Sem. 75, Reims, July 2003. In: Superlattices and Microstructures. Elsevier Science; 2004, vol. 35. p. 419-35.
    • Nzodoum Fotsing JL, Bein BK, Pelzl J. Potentialities of photothermal displacement experiments in micro-scaled systems. Proceedings of the Microscale Heat Transfer, Eurotherm Sem. 75, Reims, July 2003. In: Superlattices and Microstructures. Elsevier Science; 2004, vol. 35. p. 419-35.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.