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Volumn 19, Issue 3, 2010, Pages 531-540

Temperature-dependent properties of spray-deposited ITO thin films

Author keywords

Atomic force microscopy; Oxides; Semiconducting materials; X ray diffraction

Indexed keywords

AFM; BAND GAPS; CUBIC STRUCTURE; DEPOSITION TEMPERATURES; DIFFERENT SUBSTRATES; ELECTRICAL RESISTIVITY; ETHANOLIC SOLUTION; FIGURE OF MERIT; INDIUM TIN OXIDE THIN FILMS; INDIUM TRICHLORIDE; ITO FILMS; ITO THIN FILMS; MOSS-BURSTEIN EFFECT; OPTICAL ABSORPTION STUDIES; POLYCRYSTALLINE; PREFERENTIAL ORIENTATION; PYROLYTIC DECOMPOSITION; SEM; SEMICONDUCTING MATERIALS; SPRAY-DEPOSITED; STANNIC CHLORIDE; SUBSTRATE TEMPERATURE; TEMPERATURE-DEPENDENT PROPERTIES; VISIBLE REGION;

EID: 77954759962     PISSN: 10599630     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11666-009-9412-4     Document Type: Conference Paper
Times cited : (7)

References (46)
  • 1
    • 36549099749 scopus 로고
    • 3 Films: Basic Optical Properties and Applications to Energy- Efficient Windows
    • 3 Films: Basic Optical Properties and Applications to Energy- Efficient Windows, J. Appl. Phys., 1986, 60(11), p R123-R160.
    • (1986) J. Appl. Phys. , vol.60 , Issue.11
    • Hamberg, I.1    Granqvist, C.G.2
  • 3
    • 0021166548 scopus 로고
    • Review Semiconducting Transparent Thin Films: Their Properties and Applications
    • A.L. Dawar and J.C. Joshi, Review Semiconducting Transparent Thin Films: Their Properties and Applications, J. Mater. Sci., 1984, 19, p 1-23.
    • (1984) J. Mater. Sci. , vol.19 , pp. 1-23
    • Dawar, A.L.1    Joshi, J.C.2
  • 4
    • 0034251075 scopus 로고    scopus 로고
    • Transparent p-Type Conducting Oxides: Design and Fabrication of p-n Heterojunctions
    • H. Kawazoe, H. Yanagi, K. Ueda, and H. Hosono, Transparent p-Type Conducting Oxides: Design and Fabrication of p-n Heterojunctions, MRS Bull., 2000, 25(8), p 28-36.
    • (2000) MRS Bull. , vol.25 , Issue.8 , pp. 28-36
    • Kawazoe, H.1    Yanagi, H.2    Ueda, K.3    Hosono, H.4
  • 5
    • 0034251416 scopus 로고    scopus 로고
    • Criteria for Choosing Transparent Conductors
    • R.G. Jordan, Criteria for Choosing Transparent Conductors, MRS Bull., 2000, 25, p 52.
    • (2000) MRS Bull. , vol.25 , pp. 52
    • Jordan, R.G.1
  • 6
    • 0030395864 scopus 로고    scopus 로고
    • Variations in Microstructure and Composition of Indium Tin Oxide Films with the Deposition Technique
    • M. Rottmann, H. Hennig, B. Ziemer, R. Kalähne, and K.H. Heckner, Variations in Microstructure and Composition of Indium Tin Oxide Films with the Deposition Technique, J. Mater. Sci., 1996, 31(24), p 6495-6500.
    • (1996) J. Mater. Sci. , vol.31 , Issue.24 , pp. 6495-6500
    • Rottmann, M.1    Hennig, H.2    Ziemer, B.3    Kalähne, R.4    Heckner, K.H.5
  • 9
    • 77954761467 scopus 로고    scopus 로고
    • Physical Properties of Transparent and Conductive Sprayed ITO Thin Films: Optimization of Process Parameters for Highest Figure of Merit Films
    • Accepted
    • A.V. Moholkar, S.M. Pawar, P.S. Shinde, K.Y. Rajpure, C.H. Bhosale, and J.H. Kim, Physical Properties of Transparent and Conductive Sprayed ITO Thin Films: Optimization of Process Parameters for Highest Figure of Merit Films, 2009, Curr. Appl. Phys. (Accepted).
    • (2009) Curr. Appl. Phys.
    • Moholkar, A.V.1    Pawar, S.M.2    Shinde, P.S.3    Rajpure, K.Y.4    Bhosale, C.H.5    Kim, J.H.6
  • 10
    • 27944471034 scopus 로고    scopus 로고
    • Effect of Substrate Temperature on the Growth of ITO Thin Films
    • M. Nisha, S. Anusha, Aldrin. Antony, R. Manoj, and M.K. Jayaraj, Effect of Substrate Temperature on the Growth of ITO Thin Films, Appl. Surf. Sci., 2005, 252(5), p 1430-1435.
    • (2005) Appl. Surf. Sci. , vol.252 , Issue.5 , pp. 1430-1435
    • Nisha, M.1    Anusha, S.2    Antony, Aldrin.3    Manoj, R.4    Jayaraj, M.K.5
  • 13
    • 0037778063 scopus 로고    scopus 로고
    • Structural and Optical Properties of Indium Oxide Thin Films Prepared by an Ultrasonic Spray CVD Process
    • M. Girtan and G. Folcher, Structural and Optical Properties of Indium Oxide Thin Films Prepared by an Ultrasonic Spray CVD Process, Surf. Coat. Tech., 2003, 172(2-3), p 242-250.
    • (2003) Surf. Coat. Tech. , vol.172 , Issue.2-3 , pp. 242-250
    • Girtan, M.1    Folcher, G.2
  • 14
    • 0032664420 scopus 로고    scopus 로고
    • Structural, Optical and Electrical Properties of Indium Tin Oxide Thin Films Prepared by Spray Pyrolysis
    • E. Benamar, M. Rami, C. Messaoudi, D. Sayah, and A. Ennaoui, Structural, Optical and Electrical Properties of Indium Tin Oxide Thin Films Prepared by Spray Pyrolysis, Sol. Energ. Mater. Sol. C, 1998, 56(2), p 125-139.
    • (1998) Sol. Energ. Mater. Sol. C , vol.56 , Issue.2 , pp. 125-139
    • Benamar, E.1    Rami, M.2    Messaoudi, C.3    Sayah, D.4    Ennaoui, A.5
  • 17
    • 0034509124 scopus 로고    scopus 로고
    • Optical and Electrical Properties of Transparent Conductive ITO Thin Films Deposited by Sol-Gel Process
    • M.J. Alam and D.C. Cameron, Optical and Electrical Properties of Transparent Conductive ITO Thin Films Deposited by Sol-Gel Process, Thin Solid Films, 2000, 377-378, p 455-459.
    • (2000) Thin Solid Films , vol.377-378 , pp. 455-459
    • Alam, M.J.1    Cameron, D.C.2
  • 18
    • 0032046806 scopus 로고    scopus 로고
    • Study on Crystallinity of Tin-Doped Indium Oxide Films Deposited by DC Magnetron Sputtering
    • P.K. Song, Y. Shigesato, I. Yasui, C.W. Ow-Yang, and D.C. Paine, Study on Crystallinity of Tin-Doped Indium Oxide Films Deposited by DC Magnetron Sputtering, Jpn. J. Appl. Phys., 1998, 37(4 Suppl A), p 1870-1876.
    • (1998) Jpn. J. Appl. Phys. , vol.37 , Issue.4 SUPPL. A , pp. 1870-1876
    • Song, P.K.1    Shigesato, Y.2    Yasui, I.3    Ow-Yang, C.W.4    Paine, D.C.5
  • 19
    • 22944481791 scopus 로고    scopus 로고
    • Preparation and Characterization of Indium Tin Oxide Thin Films for Their Application as Gas Sensors
    • V.S. Vaishnav, P.D. Patel, and N.G. Patel, Preparation and Characterization of Indium Tin Oxide Thin Films for Their Application as Gas Sensors, Thin Solid Films, 2005, 487(1-2), p 277-282.
    • (2005) Thin Solid Films , vol.487 , Issue.1-2 , pp. 277-282
    • Vaishnav, V.S.1    Patel, P.D.2    Patel, N.G.3
  • 20
    • 0031702268 scopus 로고    scopus 로고
    • Annealing Effects on Opto-Electronic Properties of Sputtered and Thermally Evaporated Indium-Tin-Oxide Films
    • D.V. Morgan, Y.H. Aliyu, R.W. Bunce, and A. Salehi, Annealing Effects on Opto-Electronic Properties of Sputtered and Thermally Evaporated Indium-Tin-Oxide Films, Thin Solid Films, 1998, 312(1-2), p 268-272.
    • (1998) Thin Solid Films , vol.312 , Issue.1-2 , pp. 268-272
    • Morgan, D.V.1    Aliyu, Y.H.2    Bunce, R.W.3    Salehi, A.4
  • 21
    • 0032476282 scopus 로고    scopus 로고
    • Structural studies of ITO thin films with the Rietveld method
    • PII S0040609098010645
    • M. Quaas, C. Eggs, and H. Wulff, Structural Studies of ITO Thin Films with the Rietveld Method, Thin Solid Films, 1998, 332(1-2), p 277-281. (Pubitemid 128423204)
    • (1998) Thin Solid Films , vol.332 , Issue.1-2 , pp. 277-281
    • Quaas, M.1    Eggs, C.2    Wulff, H.3
  • 24
    • 0033138354 scopus 로고    scopus 로고
    • Versatility of Chemical Spray Pyrolysis Technique
    • P.S. Patil, Versatility of Chemical Spray Pyrolysis Technique, Mater. Chem. Phys., 1999, 59(3), p 185.
    • (1999) Mater. Chem. Phys. , vol.59 , Issue.3 , pp. 185
    • Patil, P.S.1
  • 25
    • 0027539565 scopus 로고
    • On the Mechanism of ITO Etching: The Specificity of Halogen Acids
    • M. Scholten and J.E.A.M. van der Meerakker, On the Mechanism of ITO Etching: The Specificity of Halogen Acids, J. Electrochem. Soc., 1993, 140(2), p 471-475.
    • (1993) J. Electrochem. Soc. , vol.140 , Issue.2 , pp. 471-475
    • Scholten, M.1    Van Der Meerakker, J.E.A.M.2
  • 26
    • 84975395981 scopus 로고
    • Chemical Vapor Deposition at Low Temperatures
    • J.C. Vigue and J. Spitz, Chemical Vapor Deposition at Low Temperatures, J. Electrochem. Soc., 1975, 122, p 585.
    • (1975) J. Electrochem. Soc. , vol.122 , pp. 585
    • Vigue, J.C.1    Spitz, J.2
  • 27
    • 17444378247 scopus 로고    scopus 로고
    • Thin Film Deposition Using Spray Pyrolysis
    • D. Perednis and L.J. Gauckler, Thin Film Deposition Using Spray Pyrolysis, J. Electroceram., 2005, 14, p 103-111.
    • (2005) J. Electroceram. , vol.14 , pp. 103-111
    • Perednis, D.1    Gauckler, L.J.2
  • 28
    • 0017471267 scopus 로고
    • 2 Thin Films in Relation to Their Stoichiometric Deviation and Their Crystalline Structure
    • 2 Thin Films in Relation to Their Stoichiometric Deviation and Their Crystalline Structure, Thin Solid Films, 1977, 41(2), p 127-135.
    • (1977) Thin Solid Films , vol.41 , Issue.2 , pp. 127-135
    • Manifacier, J.C.1    Murcia, M.D.2    Fillard, J.P.3    Vicario, E.4
  • 29
    • 0032483261 scopus 로고    scopus 로고
    • Oxidation Dependent Crystallization Behavior of IO and ITO Thin Films Deposited by Reactive Thermal Deposition Technique
    • P. Thilakan and J. Kumar, Oxidation Dependent Crystallization Behavior of IO and ITO Thin Films Deposited by Reactive Thermal Deposition Technique, Mater. Sci. Eng. B, 1998, 55, p 195-200.
    • (1998) Mater. Sci. Eng. B , vol.55 , pp. 195-200
    • Thilakan, P.1    Kumar, J.2
  • 31
    • 33646202250 scopus 로고
    • Anamolus Optical Absorption in InSb
    • E. Burstein, Anamolus Optical Absorption in InSb, Phys. Rev., 1954, 93, p 632-633.
    • (1954) Phys. Rev. , vol.93 , pp. 632-633
    • Burstein, E.1
  • 32
    • 34147135530 scopus 로고    scopus 로고
    • Electrical and optical properties of fluorine-doped CdO films deposited by ultrasonic spray pyrolysis
    • DOI 10.1016/j.solmat.2007.01.020, PII S0927024807000517
    • M. Kul, M. Zor, A.S. Aybek, S. Irmak, and E. Turan, Electrical and Optical Properties of Fluorine-Doped CdO Films Deposited by Ultrasonic Spray Pyrolysis, Sol. Energ. Mater. Sol. C, 2007, 91, p 882-887. (Pubitemid 46561259)
    • (2007) Solar Energy Materials and Solar Cells , vol.91 , Issue.10 , pp. 882-887
    • Kul, M.1    Zor, M.2    Aybek, A.S.3    Irmak, S.4    Turan, E.5
  • 33
    • 0004741870 scopus 로고
    • Interferenzen an Regellos Orientierten Teilchen in Rontgenlight (Interference of Irregularly Oriented Particles in X-rays)
    • P. Debye and P. Scherrer, Interferenzen an Regellos Orientierten Teilchen in Rontgenlight (Interference of Irregularly Oriented Particles in X-rays), Phys. Zeit., 1916, 17, p 277-283.
    • (1916) Phys. Zeit. , vol.17 , pp. 277-283
    • Debye, P.1    Scherrer, P.2
  • 34
    • 0028549509 scopus 로고
    • Effect of Atomic Surface Mobility on the Nucleation and Island Growth of Thin Films
    • S. Xu and G.Q. Lu, Effect of Atomic Surface Mobility on the Nucleation and Island Growth of Thin Films, J. Mater. Sci. Lett., 1994, 13, p 1629-1631.
    • (1994) J. Mater. Sci. Lett. , vol.13 , pp. 1629-1631
    • Xu, S.1    Lu, G.Q.2
  • 36
    • 36449006943 scopus 로고    scopus 로고
    • On the Initial Growth of Indium Tin Oxide on Glass
    • X.W. Sun, H.C. Huang, and H.S. Kwok, On the Initial Growth of Indium Tin Oxide on Glass, Appl. Phys. Lett., 1996, 68, p 2663.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 2663
    • Sun, X.W.1    Huang, H.C.2    Kwok, H.S.3
  • 38
    • 33845413267 scopus 로고    scopus 로고
    • Thickness Dependence of Electrical Properties of ITO Film Deposited on a Plastic Substrate by RF Magnetron Sputtering
    • D.H. Kim, M.R. Park, H.J. Lee, and G.H. Lee, Thickness Dependence of Electrical Properties of ITO Film Deposited on a Plastic Substrate by RF Magnetron Sputtering, Appl. Surf. Sci., 2006, 253, p 409-411.
    • (2006) Appl. Surf. Sci. , vol.253 , pp. 409-411
    • Kim, D.H.1    Park, M.R.2    Lee, H.J.3    Lee, G.H.4
  • 39
    • 0037091887 scopus 로고    scopus 로고
    • Highly oriented indium tin oxide films for high efficiency organic light-emitting diodes
    • DOI 10.1063/1.1461068
    • H. Kim, J.S. Horwitz, W.H. Kim, Z.H. Kafafi, and D.B. Chrisey, Highly Oriented Indium Tin Oxide Films for High Efficiency Organic Light-Emitting Diodes, J. Appl. Phys., 2002, 91, p 5371. (Pubitemid 34599021)
    • (2002) Journal of Applied Physics , vol.91 , Issue.8 , pp. 5371
    • Kim, H.1    Horwitz, J.S.2    Kim, W.H.3    Kafafi, Z.H.4    Chrisey, D.B.5
  • 40
    • 0033747601 scopus 로고    scopus 로고
    • Microstructure of Indium Oxide Films in Oxygen Ion-Assisted Deposition
    • J.S. Cho, K.H. Yoon, and S.K. Koh, Microstructure of Indium Oxide Films in Oxygen Ion-Assisted Deposition, Thin Solid Films, 2000, 368(1), p 111-115.
    • (2000) Thin Solid Films , vol.368 , Issue.1 , pp. 111-115
    • Cho, J.S.1    Yoon, K.H.2    Koh, S.K.3
  • 42
    • 0019317979 scopus 로고
    • Transparent Heat-Reflecting Coatings Based on Highly Doped Semiconductors
    • G. Frank, E. Kauer, and H. Köstlin, Transparent Heat-Reflecting Coatings Based on Highly Doped Semiconductors, Thin Solid Films, 1981, 77(1-3), p 107-118.
    • (1981) Thin Solid Films , vol.77 , Issue.1-3 , pp. 107-118
    • Frank, G.1    Kauer, E.2    Köstlin, H.3
  • 43
    • 0033170264 scopus 로고    scopus 로고
    • Comparison of Spray Pyrolyzed FTO, ATO and ITO Coatings for Flat and Bent Glass Substrates
    • H. Bisht, H.-T. Eun, A. Mehrtens, and M.A. Aegerter, Comparison of Spray Pyrolyzed FTO, ATO and ITO Coatings for Flat and Bent Glass Substrates, Thin Solid Films, 1999, 351, p 109-114.
    • (1999) Thin Solid Films , vol.351 , pp. 109-114
    • Bisht, H.1    Eun, H.-T.2    Mehrtens, A.3    Aegerter, M.A.4
  • 44
    • 0037110479 scopus 로고    scopus 로고
    • ITO Thin Films Coated Quartz Crystal Microbalance as Gas Sensor for NO Detection
    • J. Zhang, J.Q. Hu, F.R. Zhu, H. Gong, and S.J. Oshea, ITO Thin Films Coated Quartz Crystal Microbalance as Gas Sensor for NO Detection, Sens. Actuat. B Chem., 2002, 87(1), p 159-167.
    • (2002) Sens. Actuat. B Chem. , vol.87 , Issue.1 , pp. 159-167
    • Zhang, J.1    Hu, J.Q.2    Zhu, F.R.3    Gong, H.4    Oshea, S.J.5
  • 45
    • 0016992850 scopus 로고
    • New Figure of Merit for Transparent Conductors
    • G. Haacke, New Figure of Merit for Transparent Conductors, J. Appl. Phys., 1976, 47(9), p 4086-4089.
    • (1976) J. Appl. Phys. , vol.47 , Issue.9 , pp. 4086-4089
    • Haacke, G.1
  • 46
    • 1942434529 scopus 로고    scopus 로고
    • Transparent Conductive Sn-Doped Indium Oxide Thin Films Deposited by Spray Pyrolysis Technique
    • S.M. Rozati and T. Ganj, Transparent Conductive Sn-Doped Indium Oxide Thin Films Deposited by Spray Pyrolysis Technique, Renew. Energ., 2004, 29(10), p 1671-1676.
    • (2004) Renew. Energ. , vol.29 , Issue.10 , pp. 1671-1676
    • Rozati, S.M.1    Ganj, T.2


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