Variations in microstructure and composition of indium tin oxide films with the deposition technique

Journal of Materials Science

Volumn 31, Issue 24, 1996, Pages 6495-6500

  Rottmann, M ^a,b   Hennig, H ^a   Ziemer, B ^a   Kalahne R ^a   Heckner, K H ^a  

^a HUMBOLDT UNIVERSITY   (Germany)

^b EPCOS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CRYSTALLINE MATERIALS; EVAPORATION; FILM GROWTH; GLASS; GRAIN SIZE AND SHAPE; LATTICE CONSTANTS; MORPHOLOGY; SPUTTER DEPOSITION; SUBSTRATES; TIN COMPOUNDS; X RAY CRYSTALLOGRAPHY;

BIXBITE STRUCTURE; INDIUM TIN OXIDE FILMS; REACTIVE THERMAL EVAPORATION;

METALLIC FILMS;

EID: 0030395864     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF00356253     Document Type: Article

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