Microstructure of indium oxide films in oxygen ion-assisted deposition

Thin Solid Films

Volumn 368, Issue 1, 2000, Pages 111-115

  Cho, Jun Sik ^a,b   Yoon, Ki Hyun ^b   Koh, Seok Keun ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; EVAPORATION; FILM PREPARATION; ION BOMBARDMENT; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; X RAY CRYSTALLOGRAPHY;

INDIUM OXIDE FILMS; OXYGEN ION-ASSISTED DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0033747601     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)01107-4     Document Type: Article

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