Integrated SWCNT sensors in micro-wind tunnel for air-flow shear-stress measurement

Microfluidics and Nanofluidics

Volumn 8, Issue 5, 2010, Pages 631-640

  Chow, Winnie W Y ^a   Qu, Yanli ^b   Li, Wen J ^a,b   Tung, Steve C H ^b,c  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b SHENYANG INSTITUTE OF AUTOMATION   (China)

^c University of Arkansas   (United States)

Author keywords

Carbon nanotubes; CNT sensors; Micro shear stress sensor; Micro flow sensor

Indexed keywords

AIR; CARBON NANOTUBES; MICROELECTRODES; SHEAR STRESS; SINGLE-WALLED CARBON NANOTUBES (SWCN); STRESS MEASUREMENT; WIND TUNNELS; YARN;

CNT SENSORS; CONSTANT TEMPERATURE; GOLD MICROELECTRODES; MICRO FLOW SENSORS; MICRO SHEAR-STRESS SENSORS; SELF-HEATING EFFECT; SHEAR-STRESS SENSORS; SINGLE-WALLED CARBON NANOTUBE (SWCNTS);

SHEAR FLOW;

EID: 77954757382     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-009-0495-5     Document Type: Article

References (23)

1. Chow W W Y, Li WJ, Tung S C H (2008) Integrated CNT sensors in polymer microchannel for gas-flow shear-stress measurement. In: Proceedings of the IEEE international conference nano/micro engineered and molecular systems (IEEE-NEMS), Sanya, China, January 6-9, pp 1011-1014
2. Fung C K M, Chan R H M, Wong V T S, Li WJ (2004) Electrophoretic batch fabrication of bundled carbon nanotube thermal sensors. IEEE Trans Nanotechnol 3:395-403
3. Fung C K M, Sin M L Y, Lei T K F, Chow W W Y, Lai K W C, Li WJ (2005) Flow rate measurement inside polymer microfluidic systems using carbon nanotube sensors. In: Proceedings of the IEEE international conference on sensors (IEEE-Sensors), Irvine, CA, October 31-November 3, pp 541-544
4. Fung C K M, Zhang M Q H, Chan R H M, Li WJ (2005) A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements. In: Proceedings of the IEEE international conference on micro electro mechanical systems (IEEE-MEMS), Miami, FL, January 30-February 3, pp 251-254
5. Ghosh S, Sood AK, Kumar N (2003) Carbon nanotube flow sensors. Science 299:1042-1044
6. Goldberg HD, Breuer KS, Schmidt MA (1994) A silicon waferbonding technology for microfabricated shear-stress sensors with backside contacts. Technical digest of the solid-state sensor and actuator workshop, pp 111-115
7. Hanratty TJ, Cambell JA (1996) Fluid mechanics measurements. Hemisphere, New York
8. Koch M, Evans A, Brunnschweiler A (2000) Microfluidic technology and applications. Research Studies Press Ltd, Baldock, Hertfordshire, England
9. Kong J, Franklin NR, Zhou C, Chapline MG, Peng S, Cho K, Dai H (2000) Nanotube molecular wires as chemical sensors. Science 287:622-625
10. Lei KF, Li WJ, Yam Y (2005) Effects of contact-stress on hotembossed PMMA microchannel wall profile. Microsyst Technol 11:353-357
11. Liao KJ, Wang WL, Yi Z (2003) Experimental studies on flow velocity sensors based on multiwalled carbon nanotubes. Microfabr Technol 4:57-59
12. Liu C, Huang JB, Zhu ZA, Jiang F, Tung S, Tai YC, Ho CM (1999) A micromachined flow shear-stress sensor based on thermal transfer principles. J Microelectromech Syst 8:90-98
13. Naughton J, Sheplak M (2002) Modern developments in shear stress measurement. Prog Aerosp Sci 38:515-570
14. Ni CN, Deck CP, Vecchio KS, Bandaru PR (2007) Carbon nanotubebased fluid flow/shear sensors. Proc Mater Res Soc Symp, vol 263, 0963-Q23-03
15. Ong KG, Zeng K, Grimes CA (2002) A wireless, passive carbon nanotube-based gas sensor. IEEE Sens J 2:82-88
16. Padmanabhan A, Sheplak M, Breuer KS, Schmidt MA (1997) Micromachined sensors for static and dynamic shear stress measurements in aerodynamic flows. Technical digest of the international conference on transducers, Chicago, IL, June 16-19, pp 137-140
17. Qu YL, Chow W W Y, Ouyang MX, Tung S C H, Li WJ, Han X (2008) Ultra-low-powered aqueous shear stress sensors based on bulk EG-CNTs integrated in microfluidic systems. IEEE Trans Nanotechnol 7:565-572
18. Schmidt MA, Howe RT, Senturia SD, Haritonidis JH (1988) Design and calibration of a microfabricated floating-element shear-stress sensor. IEEE Trans Electron Dev 35:750-757
19. Sheplak M, Cattafesta L, Nishida T, McGinley CB (2004) MEMS shear stress sensors: promise and progress. AIAA 2004-2606, Portland, OR, June 28-July 1
20. Sinha N, Ma JZ, Yeow J T W (2006) Carbon nanotube-based sensors. J Nanosci Nanotechnol 6:573-590
21. Wong TS, Li WJ (2003) Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing. In: Proceedings of the IEEE international conference on micro electro mechanical systems (IEEE-MEMS), Kyoto, Japan, January 19-23, pp 41-44
22. Xu Y, Clendenin J, Tung S, Jiang F, Tai YC (2004) Underwater flexible shear stress sensor skins. In: Proceedings of the IEEE international conference on micro electro mechanical systems (IEEE-MEMS), Maastricht, Netherlands, January 25-29, pp 833-836
23. Xu Y, Lin Q, Lin G, Katragadda RB, Jiang F, Tung S, Tai YC (2005) Micromachined thermal shear-stress sensor for underwater applications. J Microelectromechs Syst 14:1023-1030