Ultra-low-powered aqueous shear stress sensors based on bulk EG-CNTs integrated in microfluidic systems

IEEE Transactions on Nanotechnology

Volumn 7, Issue 5, 2008, Pages 565-572

  Qu, Yanli ^a,b   Chow, Winnie W Y ^a   Ouyang, Mengxing ^a   Tung, Steve C H ^b,c   Li, Wen J ^a   Han, Xuliang ^d  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b SHENYANG INSTITUTE OF AUTOMATION   (China)

^c University of Arkansas   (United States)

^d BREWER SCIENCE INC   (United States)

Author keywords

Aqueous shear stress sensors; Carbon nanotubes (CNT); CNT sensors; Microfluidic system; Ultra low powered sensors

Indexed keywords

CARBON NANOTUBES; COMPOSITE MICROMECHANICS; DEIONIZED WATER; DENDRITES (METALLOGRAPHY); ELECTRIC RESISTANCE; FLUID MECHANICS; FLUIDIC DEVICES; GLASS; GLASS BONDING; MEMS; METALLURGY; MICROCHANNELS; MICROELECTROMECHANICAL DEVICES; SENSOR NETWORKS; SHEAR STRESS; SILICONES; STRENGTH OF MATERIALS;

AQUEOUS SHEAR STRESS SENSORS; CARBON NANOTUBES (CNT); CNT SENSORS; MICROFLUIDIC SYSTEM; ULTRA-LOW-POWERED SENSORS;

SENSORS;

EID: 53349120596     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2008.928572     Document Type: Article

References (15)

1. R. J. Goldstein, Fluid Mechanics Measurements. New York: Hemisphere, 1996, pp. 559-615.
2. M. Sheplak, L. Cattafesta, and T. Nishida, "MEMS shear stress sensors: Promise and progress," presented at the 24th AIAA Aerodynamic Meas. Technol. Ground Testing Conf., Portland, OR, Jun. 28-Jul. 1, 2004.
3. J. Naughton and M. Sheplak, "Modern developments in shear stress measurement," Progress Aerosp. Sci., vol. 38, pp. 515-570, 2002.
4. D. Fourguette, D. Modarress, D. Wilson, M. Koochesfahani, and M. Gharib, "An optical MEMS-based shear stress sensor for high Reynolds number applications," presented at the 41th AIAA Aerosp. Sci. Meet. Exhibit, Reno, NV, Jan. 6-9, 2003.
5. Y. Xu, Q. Lin, G. Y. Lin, R. B. Katragadda, F. K. Jiang, S. Tung, and Y. C. Tai, "Micromachined thermal shear-stress sensor for underwater applications," J. Microelectromech. Syst., vol. 14, no. 5, pp. 1023-1030, 2005.
6. C. Liu, J. B. Huang, Z. J. Zhu, F. K. Jiang, S. Tung, Y. C. Tai, and C. M. Ho, "A micromachined flow shear-stress sensor based on thermal transfer principles," J. Microelectromech. Syst., vol. 8, no. 1, pp. 90-98, 1999.
7. S. Ghosh, A. K. Sood, and N. Kumar, "Carbon nanotube flow sensors," Science, vol. 299, pp. 1042-1044, 2003.
8. C. N. Ni, C. P. Deck, K. S. Vecchio, and P. R. Bandaru, "Carbon nanotube-based fluid flow/shear sensors," in Proc. Mater. Res. Soc. Symp., 2007, vol.963, pp. 125-131.
9. V. T. S. Wong and W. J. Li, "Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing," in Proc. IEEE MEMS, Kyoto, Japan, Jan. 19-23, 2003, pp. 41-44.
10. C. K. M. Fung, V. T. S. Wong, and W. J. Li, "Electrophoretic batch fabrication of bundled carbon nanotube thermal sensors," IEEE Trans. Nanotechnol., vol. 3, no. 3, pp. 395-403, Sep. 2004.
11. C. K. M. Fung, M. Q. H. Zhang, R. H. M. Chan, and W. J. Li, "A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements," in Proc. 18th IEEE Int. Conf. Micro Electm Mech. Syst. (IEEE-MEMS), Miami, FL, Jan. 30-Feb. 3, 2005, pp. 251-254.
12. Y. L. Qu, M. X. Ouyang, W. J. Li, and X. L. Han, "CNTs as ultra-low-powered aqueous flow sensors in PDMS microfluidic systems," presented at the 1st Annu. IEEE Int. Conf. Nano/Molecular Med. Eng. (IEEE-NANOMED), Macau, China, Aug. 6-9, 2007.
13. J. A. Schetz and A. E. Fuhs, Handbook of Fluid Dynamics and Fluid Machinery, vol. 1. New York: Wiley, 1996.
14. T. W. Tombler, C. W. Zhou, L. Alexseyev, J. Kong, H. J. Dai, L. Liu, C. S. Jayanthi, M. J. Tang, and S. Y. Wu, "Reversible electromechanical characteristics of carbon nanotubes under local-probe manipulation," Nature, vol. 405, no. 15, pp. 769-772, 2000.
15. Y. Zohar, Heat Convection in Micro Ducts. Boston, MA: Kluwer, 2003, pp. 53-75.