Micromachined thermal shear-stress sensor for underwater applications

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 1023-1030

  Xu, Yong ^a   Lin, Qiao ^b   Lin, Guoyu ^c   Katragadda, Rakesh B ^a   Jiang, Fukang ^d   Tung, Steve ^e   Tai, Yu Chong ^f  

^a Wayne State University   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c ANSYS INC   (United States)

^d Umachines Inc   (United States)

^e University of Arkansas   (United States)

^f California Institute of Technology   (United States)

Author keywords

Microsensor; Thermal flow sensor; Underwater sensor

Indexed keywords

CORROSION; FAILURE ANALYSIS; FLOWMETERS; MICROSENSORS; POLYSILICON; PRESSURE MEASUREMENT; SHEAR STRESS; THERMAL STRESS; UNDERWATER EQUIPMENT; WATERPROOF COATINGS;

THERMAL FLOW SENSOR; THERMAL SHEAR-STRESS SENSOR; UNDERWATER APPLICATIONS; UNDERWATER SENSOR;

MICROELECTROMECHANICAL DEVICES;

EID: 27644499960     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.856644     Document Type: Article

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