Nanomechanical properties of silicon surfaces nanostructured by excimer laser

Science and Technology of Advanced Materials

Volumn 11, Issue 2, 2010, Pages

  Kumar, Prashant ^a   Kiran, M S R N ^b  

^a JAWAHARLAL NEHRU CENTRE FOR ADVANCED SCIENTIFIC RESEARCH   (India)

^b INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

excimer laser; nanocrystallinity; nanoindentation; nanostructuring

Indexed keywords

AMBIENT TEMPERATURES; ANGLE OF INCIDENCE; EXCIMER LASER IRRADIATION; LASER FLUENCES; LASER IRRADIATIONS; LASER PARAMETERS; NANO-STRUCTURED; NANO-STRUCTURING; NANOCRYSTALLINES; NANOCRYSTALLINITY; NANOMECHANICAL PROPERTY; NANOMETER-SIZED PARTICLES; NANOSTRUCTURED SILICON; SILICON SURFACES; SINGLE CRYSTAL SILICON;

EXCIMER LASERS; GAS LASERS; IRRADIATION; LASER BEAM EFFECTS; LASER PULSES; NANOCRYSTALLINE SILICON; NANOINDENTATION; RAMAN SPECTROSCOPY; X RAY DIFFRACTION;

PULSED LASER APPLICATIONS;

EID: 77954531361     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1088/1468-6996/11/2/025003     Document Type: Article

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