Lateral structuring of porous silicon: Application to waveguides

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 1, 2003, Pages 284-287

  Rossi, A M ^a,b   Borini, S ^a,b   Boarino, L ^a   Amato, G ^a  

^a Ist Elettrotecn Naz G Ferraris   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

LASER ABLATION; POROUS SILICON; SEMICONDUCTOR DEVICE STRUCTURES; THERMAL CONDUCTIVITY; WAVEGUIDES;

LASER LOCAL OXIDIZED METHOD; PHOTONIC STRUCTURES;

SEMICONDUCTING SILICON;

EID: 0038038908     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306482     Document Type: Conference Paper

References (10)

1. H. F. Arrand, T. M. Benson, P. Sewell, A. Loni, R. Bozeat, R. Arens-Fisher, M. G. Kruger, M. Thoenissen, and H. Luth, IEEE J. Sel. Top. Quantum Electron. 4, 975 (1998).
2. N. Vorozov, L. Dolgyi, V. Yakovtseva, V. Bondarenko, M. Balucani, G. Lamedica, A. Ferrari, G. Vitrant, J. E. Broquin, T. M. Benson, H. F. Harrand, and P. Sewell, Electron. Lett. 36, 722 (2000).
3. G. Benedetto, L. Boarino, N. Brunetto, A. M. Rossi, R. Spagnolo, and G. Amato, Phil. Mag. B 76, 383 (1997).
4. A. M. Rossi I. Rendina, G. Perrone, F. Cappelluti, A. Morra, G. Amato, L. Boarino, and G. Motta, Proc. SPIE, 3953, 112 (2000).
5. S. Uehara, T. Kubo, S. Ogada, T. Sato, J. Hosono, and T. Matsubara, Mat. Res. Soc. Symp. Proc. 486 (1998).
6. V. Yu. Timoscheko, Th. Dittrich, I. Sieber, J. Rappich, B. V. Kamenev and P. K. Kashkarov, phys. stat. sol. (a) 182, 325 (2000).
7. A. M. Rossi, S. Borini, V. Camarchia, G. Amato, and L. Boarino, Appl. Phys. Lett. 78, 3003 (2001).
8. E. Yablonovitch, Phys. Rev. Lett. 58, 2059 (1987).
9. J. D. Joannopoulos, P. R. Villeneuve, and S. Fan, Nature 386, 143 (1997).
10. P. Ferrand, D. Loi, and R. Romestain, Appl. Phys. Lett. 79, 3017 (2001).