Raman spectroscopy of Si-rich SiO2 films: Possibility of Si cluster formation

Journal of Physics Condensed Matter

Volumn 8, Issue 26, 1996, Pages 4823-4835

  Kanzawa, Y ^a   Hayashi, S ^a   Yamamoto, K ^a  

^a KOBE UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000998037     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/8/26/014     Document Type: Article

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