High-speed and wide-angle deflection optical MEMS scanner using piezoelectric actuation

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 5, Issue 3, 2010, Pages 361-368

  Iseki, Takayuki ^a   Okumura, Mikio ^a   Sugawara, Takashi ^a  

^a Victor Company of Japan Limited   (Japan)

Author keywords

Laser display; MEMS; Optical scanning; Piezoelectric actuator; Scanner; ZnO

Indexed keywords

COMPOSITE MICROMECHANICS; LASER RECORDING; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TORSIONAL STRESS; ZINC; ZINC OXIDE;

ANGULAR DEFLECTION; APPLIED VOLTAGES; HIGH FREQUENCY; HIGH RESOLUTION; HIGH-SPEED; HORIZONTAL SCANNING; LASER DISPLAY; MAXIMUM PRINCIPAL STRESS; MICROELECTROMECHANICAL SYSTEMS; OPTICAL BEAMS; OPTICAL MEMS; OPTICAL SCANNERS; OPTICAL SCANNING; PEAK-TO-PEAK VOLTAGES; PIEZOELECTRIC ACTUATION; PIEZOELECTRIC STACK ACTUATORS; RESONANT DRIVING; SILICON ON INSULATOR WAFERS; TORSION BEAMS; UNIMORPH ACTUATORS; WIDE DEFLECTION; ZNO;

SCANNING;

EID: 77954447670     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20542     Document Type: Article

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