SCOPUS 정보 검색 플랫폼

Volumn 97-98, Issue , 2002, Pages 620-631

A high-frequency, high-stiffness piezoelectric actuator for microhydraulic applications

(9) Roberts, David C a Li, Hanqing a Steyn, J Lodewyk a Turner, Kevin T a Mlcak, Richard c Saggere, Laxminarayana a Spearing, S Mark a Schmidt, Martin A b Hagood, Nesbitt W a

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

b Massachusetts Institute of Technology (United States)

c Boston MicroSystems Inc (United States)

Author keywords

Actuator; Eutectic; MEMS; Micromachined; Piezoelectric

Indexed keywords

BOROSILICATE GLASS; EUTECTICS; FREQUENCIES; GOLD ALLOYS; HYDRAULIC CONTROL EQUIPMENT; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; STIFFNESS; THIN FILMS;

FLUID PUMPING MECHANISM; MICROHYDRAULIC SYSTEM; MICROHYDRAULIC TRANSDUCER; PIEZOELECTRIC CYLINDERS; SILICON MICROMACHINED TETHERED PISTON STRUCTURE;

ACTUATORS;

EID: 0036544033 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00841-X Document Type: Conference Paper

Times cited : (12)

References (8)

1
- 18844416508
- Development of micro-hydraulic transducer technology
- Proceedings of the 10th International Conference on Adaptive Structures and Technologies, Technical Digest, Paris, France, 11-13 October 1999 , pp. 71-81
- Hagood, N.W.¹ Roberts, D.C.² Saggere, L.³ Schmidt, M.A.⁴ Spearing, S.M.⁵ Breuer, K.S.⁶ Mlcak, R.⁷ Carretero, J.A.⁸ Ganji, F.⁹ Li, H.Q.¹⁰ Chen, K.S.¹¹ Su, Y.H.¹² Pulitzer, S.¹³

2
- 0009702396
- Modeling, design, and simulation of a piezoelectrically driven microvalve for high pressure, high frequency applications
- Proceedings of the Eighth Annual International Symposium on Smart Structures and Materials, Technical Digest, Newport Beach, CA, 4-8 March 2001
- Roberts, D.C.¹ Yaglioglu, O.² Carretero, J.A.³ Su, Y.H.⁴ Saggere, L.⁵ Hagood, N.W.⁶

3
- 0005733562
- A high frequency high flow rate piezoelectrically driven MEMS micropump
- Proceedings of the Solid State Sensor and Actuator Workshop, Technical Digest, Hilton Head, SC, 4-8 June 2000 , pp. 69-72
- Li, H.Q.¹ Roberts, D.C.² Steyn, J.L.³ Turner, K.T.⁴ Carretero, J.A.⁵ Yaglioglu, O.⁶ Su, Y.H.⁷ Saggere, L.⁸ Hagood, N.W.⁹ Spearing, S.M.¹⁰ Schmidt, M.A.¹¹

4
- 0030865473
- Novel micropump design with thick-film piezo-electric actuation
- (1997) Meas. Sci. Technol. , vol.8 , Issue.1 , pp. 49-57
- Koch, M.¹ Harris, N.² Maas, R.³ Evans, A.G.R.⁴ White, N.M.⁵ Brunnschweiler, A.⁶

5
- 0031344958
- Designing high-performance micro-pumps based on nomoving-parts valves
- ASME, New York
- (1997) Proceedings of the 1997 ASME International Mechanical Engineering Congress and Exposition on Microelectro-mechanical System (MEMS): 1997 Micromechanical Systems Microscale Energy Transport , pp. 47-53
- Bardell, R.L.¹ Sharma, N.R.² Forster, F.K.³ Afromowitz, M.A.⁴ Penney, R.J.⁵

6
- 0030283105
- The VAMP-a new device for handling liquids or gases
- (1996) Sens. Actuators A , vol.57 , pp. 153-157
- Stehr, M.¹ Messner, S.² Sandmaier, H.³ Zengerle, R.⁴

7
- 0024764864
- Normally closed microvalve and micropump fabricated on a silicon wafer
- (1989) Sens. Actuators , vol.20 , pp. 163-169
- Esashi, M.¹ Shoji, S.² Nakano, A.³

8
- 0031237724
- Characteristics of relaxor-based piezoelectric single crystals for ultrasonic transducers
- (1997) IEEE Trans. Ultrason. Ferroelectrics Freq. Control , vol.44 , Issue.5 , pp. 1140-1147
- Park, S.E.¹ Shrout, T.R.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.