Investigation on processing compatibility of ZnO piezoelectric film with MEMS device

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 369-376

  Xu, Tao ^a   Wu, Guoying ^b   Zhang, Guobing ^b   Hao, Yilong ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b PEKING UNIVERSITY   (China)

Author keywords

MEMS fabrication; Micromachine process; Process compatibility; ZnO piezoelectric film

Indexed keywords

DRY ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOLITHOGRAPHY; PIEZOELECTRIC MATERIALS; ZINC OXIDE;

PIEZOELECTRIC FILMS;

MICROELECTRONIC PROCESSING;

EID: 0035768533     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448990     Document Type: Article

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