Fabrication of a cantilever structure for piezoelectric microphone

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 7158-7159

  Zhang, Lin Tao ^a   Ren, Tian Ling ^a   Liu, Jian She ^a   Liu, Li Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Cantilever structure; Piezoelectric microphone; PZT

Indexed keywords

CANTILEVER BEAMS; FABRICATION; PIEZOELECTRICITY; TITANATE MINERALS;

AUDIO FREQUENCY; CANTILEVER STRUCTURE; PIEZOELECTRIC MICROPHONE; PZT;

MICROPHONES;

EID: 32444437235     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.7158     Document Type: Article

References (4)

1. R. P. Ried, E. S. Kim, D. M. Hong and R. S. Muller: J. MEMS 2 (1993) 111.
2. S. S. Lee, R. P. Ried and R. M. White: J. MEMS 5 (1996) 238.
3. T. L. Ren, L. T. Zhang, L. T. Liu and Z. J. Li: Integr. Ferroelectr. 41 (2001) 1753.
4. T. L. Ren, L. T. Zhang, L. T. Liu and Z. J. Li: Integr. Ferroelectr. 39 (2001) 1165.