Molecular dynamics study of glancing angle gas cluster irradiation on irregular-structured surfaces

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 261, Issue 1-2 SPEC. ISS., 2007, Pages 639-642

  Aoki, Takaaki ^a   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Gas cluster ion beam; Molecular dynamics; Silicon; Sputtering; Surface smoothing

Indexed keywords

BLOCK STRUCTURES; GAS CLUSTER ION BEAMS; MOLECULAR DYNAMICS (MD) SIMULATIONS; SURFACE SMOOTHING;

COMPUTER SIMULATION; ION SOURCES; IRRADIATION; SILICON; SPUTTERING; SURFACE TREATMENT;

MOLECULAR DYNAMICS;

EID: 34447288539     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.04.005     Document Type: Article

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