Development of size-selected cluster ion irradiation system

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 466-468

  Toyoda, N ^a   Houzumi, S ^a   Yamada, I ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster ion; Damage; Magnet; Size selection

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; IRRADIATION; MAGNETIC FILTERS; MAGNETS; MOLECULAR DYNAMICS;

ATOMIC MASS; CLUSTER ION; DAMAGE; SIZE SELECTION;

ION BEAMS;

EID: 28544440504     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.129     Document Type: Conference Paper

References (4)

1. N. Toyoda, H. Kitani, N. Hagiwara, T. Aoki, J. Matsuo, and I. Yamada Mater. Chem. Phys. 54 1998 106
2. T. Aoki, T. Seki, J. Matsuo, Z. Insepov, and I. Yamada Nucl. Instr. and Meth. B 153 1999 264
3. I. Yamada, J. Matsuo, N. Toyoda, and A. Kirkpatrick Mater. Sci. Eng. R 34 2001 231
4. H. Pauly Atom Molecule and Cluster Beams II 2000 Springer Berlin p. 137